논문 및 연구활동 |
- 연구활동(주요논문)
-
[논문]
김창구, 김준현, 박정근, 조성운,
Fabrication of uniformly arrayed single- and multi-directional slanted Cu nanorods
, ECS SOLID STATE LETTERS
, Vol.4
, No.11
(Nov, 2015)
-
[논문]
김창구, 강두원, 김상욱, 이혜민, 정경화,
Direct and environmentally benign synthesis of manganese oxide/graphene composites from graphite for electrochemical capacitors
, JOURNAL OF POWER SOURCES
, Vol.281
, pp.44
-48
(May, 2015)
-
[논문]
김창구, 권범진, 송찬주, 강흥중, 이혜민, 조성운,
Abrupt change with surfactant concentration in the surface morphology of the electrodeposited manganese oxide films for electrochemical capacitors
, ELECTROCHIMICA ACTA
, Vol.160
, pp.50
-56
(Apr, 2015)
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[논문]
김상욱, 정경화, 강지구, 이혜민, 이재혁, 김재호, 김창구, 이희웅,
ZrO2-SiO2 nanosheets with ultrasmall WO3 nanoparticles and their enhanced pseudocapacitance and stability
, ACS APPLIED MATERIALS & INTERFACES
, Vol.6
, No.22
, pp.20171
-20178
(Nov, 2014)
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[논문]
김상욱, 이혜민, 정경화, Yuanzhe Piao, 이희웅, 이재혁, 김재호, 김창구,
One-pot synthesis of thin Co(OH)2 nanosheets on graphene and their high activity as a capacitor electrode
, RSC ADVANCES
, Vol.4
, pp.51619
-51623
(Oct, 2014)
- 국제학술논문지
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[논문]
김창구, 박진수, 신용선, 김준현,
Atmospheric-pressure floating electrode-dielectric barrier discharge with flexible electrodes: Effect of conductor shapes
, KOREAN JOURNAL OF CHEMICAL ENGINEERING = KOREAN JOURNAL OF CHEMICAL ENGINEERING
, pp.1371
-1376
(Aug, 2019)
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[논문]
김창구, 김지현, 김수현, 박진수, 김준현,
Auto-masked surface texturing of kerf-loss free silicon wafers using hexafluoroisopropanol in a capacitively coupled plasma etching system
, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
, Vol.8
, No.4
(May, 2019)
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[논문]
김창구, 박진수, 김준현,
Angular dependence of SiO2 etching in plasmas containing heptafluoropropyl methyl ether
, THIN SOLID FILMS
, Vol.669
, pp.262
-268
(Jan, 2019)
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[논문]
김창구, 박진수, 김준현,
Plasma etching of SiO2 using heptafluoropropyl methyl ether and perfluoropropyl vinyl ether
, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
, Vol.7
, No.11
(Nov, 2018)
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[논문]
김창구, 이혜민, 이혜민, 윤현식, Gaoxiang Wu, Shu Yang, 권도경, 김준현, 김재경,
Clustering and self-recovery of slanted hydrogel micropillars
, ADVANCED MATERIALS INTERFACES
, pp.1801141
-1801147
(Oct, 2018)
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[논문]
김창구, 김수현, 김지현, 김준현,
Reducing the optical reflectance of kerf-loss free silicon wafers via auto-masked CF4/O2 plasma etch
, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
, Vol.7
, No.5
, pp.88
-91
(May, 2018)
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[논문]
김지현, 김창구, 오수연,
High responsivity β-Ga2O3 metal-semiconductor-metal solar-blind photodetectors with ultra-violet transparent graphene electrodes
, ACS PHOTONICS
, pp.1123
-1128
(Mar, 2018)
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[논문]
김창구, 박정근, 이강택, 김준현,
Control of the electrical resistivity of Ni-Cr wires using low pressure chemical vapor deposition of tin
, APPLIED SURFACE SCIENCE
, Vol.429
, pp.134
-137
(Jan, 2018)
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[논문]
채희엽, 김용재, 김창구, 고경범,
Quasi Atomic Layer Etching of SiO2 using Surface Fluorination for Surface Cleaning
, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(Jan, 2018)
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[논문]
김창구, 조성운, 김준현,
Angular dependence of Si3N4 etching in C4F6/CH2F2/O2/Ar plasmas
, CHEMICAL ENGINEERING & TECHNOLOGY
, Vol.40
, No.12
, pp.2251
-2256
(Dec, 2017)
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[논문]
김창구, 채희엽, 박창진, 김준현, 조성운,
Angular dependences of SiO2 etch rates at different bias voltages in CF4, C2F6, and C4F8 plasmas
, THIN SOLID FILMS
, pp.43
-48
(Sep, 2017)
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[논문]
김창구, 김상욱, 정경화, 이혜민,
Low-temperature direct synthesis of mesoporous vanadium nitrides for electrochemical capacitors
, APPLIED SURFACE SCIENCE
, pp.194
-199
(Apr, 2017)
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[논문]
김창구, 채희엽, 이혼영, 장해규, 이학승,
Sensitivity enhancement of dielectric plasma etching endpoint detection by optical emission spectra with modified K-means cluster analysis
, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
, Vol.30
, No.1
, pp.17
-22
(Feb, 2017)
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[논문]
김창구, 채희엽, 이혜민, 조성운, 김준현,
Superhydrophobic Si surfaces having microscale rod structures prepared in a plasma etching system
, SURFACE & COATINGS TECHNOLOGY
, pp.82
-86
(Nov, 2016)
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[논문]
김창구, 이경미, 강두원, 김준현, 이혜민,
Effect of oxygen flow rate on the electrical and optical characteristics of dopantless tin oxide films fabricated by LPCVD
, KOREAN JOURNAL OF CHEMICAL ENGINEERING
, Vol.33
, No.9
, pp.2711
-2715
(Sep, 2016)
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[논문]
김창구, 박정근, 김준현, 조성운, 이혜민,
Fabrication of Slanted Cu Nanopillars with Uniform Arrays
, NANOMATERIALS AND NANOTECHNOLOGY
, Vol.6
, pp.1
-5
(Mar, 2016)
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[논문]
김창구, 강태경, 엄기주, 이강택, 이도창, 박진모, 장호찬,
Minimizing the fluorescence quenching caused by uncontrolled aggregation of CdSe/CdS core/shell quantum dots for biosensor applications
, SENSORS AND ACTUATORS B-CHEMICAL
, Vol.222
, pp.871
-878
(Jan, 2016)
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[논문]
김창구, 조성운, 백창용, 강두원, 이경미, 김준현, 이혜민,
Electrical, structural, and morphological characteristics of dopantless tin oxide films prepared by low pressure chemical vapor deposition
, SCIENCE OF ADVANCED MATERIALS
, Vol.8
, No.1
, pp.117
-121
(Jan, 2016)
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[논문]
김창구, Thanh-Truc Pham, Chinh Nguyen-Huy, 손태환, Thuy-Duong Nguyen-Phan, 신은우, 이현준,
Cu-doped TiO2/reduced graphene oxide thin-film photocatalysts: Effect of Cu content upon methylene blue removal in water
, CERAMICS INTERNATIONAL
, Vol.41
, No.9
, pp.11184
-11193
(Nov, 2015)
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[논문]
김창구, 김준현, 박정근, 조성운,
Fabrication of uniformly arrayed single- and multi-directional slanted Cu nanorods
, ECS SOLID STATE LETTERS
, Vol.4
, No.11
(Nov, 2015)
-
[논문]
김창구, 김상인, 신은우, 조성운, 김준현,
Reduction in the diameter of contact holes with a high anisotropy and aspect ratio
, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
, Vol.4
, No.7
(Jul, 2015)
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[논문]
김창구, 신은우, Chinh Nguyen Huy, Thuy-Duong Nguyen-Phan,
Facile microwave-assisted synthesis and controllable architecture of three-dimensional nickel titanate
, CRYSTENGCOMM
, Vol.17
, pp.4562
-4574
(Jun, 2015)
-
[논문]
김창구, 강두원, 김상욱, 이혜민, 정경화,
Direct and environmentally benign synthesis of manganese oxide/graphene composites from graphite for electrochemical capacitors
, JOURNAL OF POWER SOURCES
, Vol.281
, pp.44
-48
(May, 2015)
-
[논문]
김창구, 권범진, 송찬주, 강흥중, 이혜민, 조성운,
Abrupt change with surfactant concentration in the surface morphology of the electrodeposited manganese oxide films for electrochemical capacitors
, ELECTROCHIMICA ACTA
, Vol.160
, pp.50
-56
(Apr, 2015)
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[논문]
김상인, 김창구, 정창영,
Slot-embedded photonic-crystal resonator with enhanced modal confinement
, OPTICS LETTERS
, Vol.40
, No.4
, pp.554
-557
(Feb, 2015)
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[논문]
김상욱, 정경화, 강지구, 이혜민, 이재혁, 김재호, 김창구, 이희웅,
ZrO2-SiO2 nanosheets with ultrasmall WO3 nanoparticles and their enhanced pseudocapacitance and stability
, ACS APPLIED MATERIALS & INTERFACES
, Vol.6
, No.22
, pp.20171
-20178
(Nov, 2014)
-
[논문]
김상욱, 이혜민, 정경화, Yuanzhe Piao, 이희웅, 이재혁, 김재호, 김창구,
One-pot synthesis of thin Co(OH)2 nanosheets on graphene and their high activity as a capacitor electrode
, RSC ADVANCES
, Vol.4
, pp.51619
-51623
(Oct, 2014)
-
[논문]
김창구, 이강택, 강두원, 조성운, 김준현,
Single- and Multi-Directional Slanted Plasma Etching of Silicon under Practical Plasma Processing Conditions
, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
, Vol.3
, No.11
(Sep, 2014)
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[논문]
김창구, 이강택, 이혜민,
Electrodeposition of manganese-nickel oxide films on a graphite sheet for electrochemical capacitor applications
, MATERIALS
, Vol.7
, No.1
, pp.265
-274
(Jan, 2014)
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[논문]
김창구, 이강택, 이혜민, Rajagopal,
Hydrothermal synthesis of one-dimensional tungsten oxide nanostructures using cobalt ammonium sulfate as a structure-directing agent
, KOREAN JOURNAL OF CHEMICAL ENGINEERING
, Vol.30
, No.10
, pp.1833
-1835
(Oct, 2013)
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[논문]
김창구, 채희엽, 남재욱, 장해규,
Real-Time Endpoint Detection of Small Exposed Area SiO2 Films in Plasma Etching Using Plasma Impedance Monitoring with
Modified Principal Component Analysis
, PLASMA PROCESSES AND POLYMERS
, Vol.10
, No.10
, pp.850
-856
(Oct, 2013)
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[논문]
Rajagopal, Robichaud, Khyzhun, Djaoued, 김창구, Nataraj,
Controlled synthesis of MoO3 microcrystals by subsequent calcination of hydrothermally grown pyrazine-MoO3 nanorod hybrids and their photodecomposition properties
, MATERIALS CHEMISTRY AND PHYSICS
, Vol.141
, No.1
, pp.383
-392
(Aug, 2013)
-
[논문]
이강택, 윤철상, 홍현국, 황대현, 이도창, 김영주, 김창구, 김현창,
High luminescence efficiency white light emitting diodes based on surface functionalized quantum dots dispersed in polymer matrices
, COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
, Vol.428
, pp.86
-91
(Apr, 2013)
-
[논문]
김창구, 채희엽, 이혜민,
Electroless deposition of NiMoP films using alkali-free chemicals for capping layers of copper interconnections
, KOREAN JOURNAL OF CHEMICAL ENGINEERING
, Vol.29
, No.9
, pp.1259
-1265
(Sep, 2012)
-
[논문]
김창구, 채희엽, 문상흡, 조성운, 이진관,
Angular dependences of SiO2 etch rates in C4F6/O2/Ar and C4F6/CH2F2/O2/Ar plasmas
, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(Jul, 2012)
-
[논문]
김창구, 이강택, S.G.Kandalkar, 이혜민, 서승혜,
Preparation and characterization of the electrodeposited Ni-Co oxide thin films for electrochemical capacitors
, KOREAN JOURNAL OF CHEMICAL ENGINEERING
, Vol.28
, No.6
, pp.1464
-1467
(Jun, 2011)
-
[논문]
김창구, 이강택, 서승혜, Kandalkar, 이혜민,
Cobalt-nickel composite films synthesized by chemical bath deposition method as an electrode material for supercapacitors
, JOURNAL OF MATERIALS SCIENCE
, pp.2977
-2981
(May, 2011)
-
[논문]
김창구, Kandalkar, 채희엽, 이혜민,
Structural, morphological, and electrical characteristics of the electrodeposited cobalt oxide electrode for supercapacitor applications
, MATERIALS RESEARCH BULLETIN
, Vol.46
, pp.48
-51
(Jan, 2011)
-
[논문]
김창구, 이강택, 손영선, 남궁윤미, 이혜민,
Characteristics of electrodeposited CoWP capping layers using alkali-metal-free precursors
, KOREAN JOURNAL OF CHEMICAL ENGINEERING
, pp.1596
-1600
(Sep, 2010)
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[논문]
이강택, 이기태, 이호섭, Wu Zhijian, 김창구, 이덕규,
Comparison of amine-functionalized mesoporous silica particles for ibuprofen delivery
, KOREAN JOURNAL OF CHEMICAL ENGINEERING
, Vol.27
, No.4
, pp.1333
-1337
(Jul, 2010)
-
[논문]
C.D.Lokhande, D.S.Dhawale, 김창구, Kandalkar,
Chemical synthesis of cobalt oxide thin film electrode for supercapacitor application
, SYNTHETIC METALS
, pp.1299
-1302
(Jun, 2010)
-
[논문]
이강택, 노민호, 이호섭, 주상우, 김창구, 김태훈,
Fluorescence Quenching Caused by Aggregation of Water- Soluble CdSe Quantum Dots
, COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
, Vol.359
, No.1-3
, pp.39
-44
(Apr, 2010)
-
[논문]
문상흡, 이승행, 장일용, 김창구, 이진관,
Mechanism of sidewall necking and bowing in the plasma etching of high aspect-ratio contanct holes
, JOURNAL OF THE ELECTROCHEMICAL SOCIETY
, Vol.157
, No.3
(Jan, 2010)
-
[논문]
김창구, 우상호, 김해원, 엄평용, 지정민, 김일욱,
Formation and characterization of thin silicon dioxide films obtained by inductively-coupled high-density plasmas using a dual rotated spiral antenna system
, ECS Transcations
, Vol.25
, No.6
, pp.173
-178
(Oct, 2009)
-
[논문]
문상흡, 장일용, 이승행, 이진관, 김창구, 민재호,
Oblique-directional plasma etching of Si using a Faraday cage
, Journal of the Electrochemical Society
, Vol.156
, No.7
, pp.222
-225
(Jul, 2009)
-
[논문]
김창구, Mahapatra, Anthony, 이상민, 이혜민,
Effect of titanium ion concentration on electrodeposition of nanostructured TiNi films
, Journal of Materials Science
, Vol.44
, No.14
, pp.3731
-3735
(Jul, 2009)
-
[논문]
김창구, 엄평용, 김일욱, 우상호, 이혜민,
Film Properties of Nitrogen-Doped Polycrystalline Silicon for Advanced Gate Material
, Korean Journal of Chemical Engineering
, Vol.26
, No.3
, pp.824
-827
(May, 2009)
-
[논문]
문상흡, 장일용, 이진관, 김창구, 이승행,
Cyclic deposition/etching process to etch a bowing-free SiO2 contact hole
, Journal of the Electrochemical Society
, Vol.156
, No.8
, pp.269
-274
(May, 2009)
-
[논문]
김창구, 윤형진, Dulal, 신치범,
Electrodeposition of CoWP film V. Structural and morphological characterisations
, Applied Surface Science
, Vol.255
, No.11
, pp.5795
-5801
(Mar, 2009)
-
[논문]
채희엽, 황진하, 정동근, 김창구, 김치정,
Argon and nitrogen plasma surface treatments of polyimide films for electroless copper plating
, Journal of the Korean Physical Society
, Vol.54
, No.2
, pp.621
-627
(Feb, 2009)
-
[논문]
김창구, 이형무, 성준용, Dulal, 김태호,
Development of an alkali-metal-free bath for electroless deposition of Co-W-P capping layers for copper interconnections
, Journal of Alloys and Compounds
, Vol.467
, No.1-2
, pp.370
-375
(Jan, 2009)
-
[논문]
김창구, 김일욱, 이형무, 이혜민, 채희엽, 남궁윤미,
Dependence of Etch Rates of Silicon Substrates on the Use of C4F8 and C4F6 Plasmas in the Deposition Step of the Bosch Process
, Journal of Vacuum Science and Technology B
, Vol.27
, No.1
, pp.33
-40
(Jan, 2009)
-
[논문]
김창구, 윤형진, Dulal, 신치범,
Characterisation of electrodeposited Co-W-P amorphous coatings on carbon steel
, Electrochimica Acta
, Vol.54
, No.2
, pp.370
-375
(Dec, 2008)
-
[논문]
김창구, 김태호, Dulal, 신치범,
Electrodeposition of CoWP Film IV. Effect of Applied Potential and Current Density
, Journal of Alloys and Compounds
, Vol.261
, No.1-2
, pp.382
-388
(Aug, 2008)
-
[논문]
김창구, 채희엽, Dulal, 김태호, 박창한,
Optimisation of Process Parameters for Electroless Plating of Co-W-P Capping Layers from an Alkali-Metal-Free Bath
, Surface and Coatings Technology
, Vol.202
, No.19
, pp.4861
-4867
(Jun, 2008)
-
[논문]
이상민, 김창구, 임한조, s. kumar mahapatra, 이혜민, 이황운, john kiran anthony, 김기홍, 김희철,
Particle size-dependent giant nonlinear absorption in nanostructured Ni-Ti alloys
, Optics Express
, Vol.16
, No.15
, pp.11193
-11202
(Jun, 2008)
-
[논문]
김창구, 김일욱, 권혁규, 이형무, 김현정, 유재석,
Comparison of Deep Silicon Etching Using SF6/C4F8 and SF6/C4F6 Plasmas in the Bosch Process
, Journal of Vacuum Science and Technology B
, Vol.26
, No.2
, pp.576
-581
(Mar, 2008)
-
[논문]
김창구, S.M.S.I. Dulal, 윤형진, 신치범,
Electrodeposition of CoWP Film II. Effect of Electrolyte Concentration
, Journal of Applied Electrochemistry
, Vol.38
, No.1
, pp.83
-91
(Jan, 2008)
-
[논문]
김창구, S.M.S.I.Dulal, 윤형진, 신치범,
Electrodeposition of CoWP Film III. Effect of pH and Temperature
, Electrochimica Acta
, Vol.53
, No.2
, pp.934
-943
(Dec, 2007)
-
[논문]
김창구, S.M.S.I.DULAL, 윤형진, 신치범,
Electrodeposition of CoWP Film
, Journal of the Electrochemical Society
, Vol.154
, No.10
(Oct, 2007)
-
[논문]
김창구, 김일욱, 최형수, 엄평용, 이동근, 조성길, 우상호, 김해원,
Structural and Morphological Properties of Nitrogen-Doped Polysilicon for Advanced Gate Material
, ECS Transactions
, Vol.11
, No.4
, pp.601
-606
(Oct, 2007)
-
[논문]
채희엽, 장성기, 정동근, 김창구, 김형섭,
Simultaneous Oxygen Plasma and Thermal Treatments of an ITO Surface to Improve the Electrical Characteristics of Organic Light-Emitting Diodes
, Journal of the Korean Physical Society
, Vol.51
, No.3
, pp.956
-962
(Sep, 2007)
-
[논문]
김창구, 민재호, 김태호, 윤형진, 신치범, 문상흡,
Comparison of Atomic Scale Etching of poly-Si in Inductively Coupled Ar and He Plasmas
, Korean Journal of Chemical Engineering
, Vol.24
, No.4
, pp.670
-673
(Jul, 2007)
-
[논문]
김창구, 류현규, 김일욱, 신치범, 이강택,
A Comparative Study on a High Aspect Ratio Contact Hole Etching in UFC- and PFC-Containing Plasmas
, Microelectronics Journal
, Vol.38
, No.1
, pp.125
-129
(Jan, 2007)
-
[논문]
문상흡, 민재호, 이진관, 김창구,
Interactive relationships between sidewall and bottom etch rates, as-affected by sidewall angle, during SiO2 etching in a CHF3 plasma
, Journal of Vacuum Science & Technology B
, Vol.24
, No.4
, pp.1746
-1754
(Jul, 2006)
-
[논문]
김창구, 김일욱, 류현규, 신치범,
Effects of Wafer Cleaning on the Interconncet Structure and Its Electrical Properties during the Al Dual Damascene Process for the Fabrication of Sub-100nm Memory Devices
, Journal of Chemical Engineering of Japan
, Vol.38
, No.11
, pp.922
-928
(Nov, 2005)
-
[논문]
김창구,
Ion Dynamics in Plasma Processing for the Fabrication of Ultrafine Structures
, Korean Journal of Chemical Engineering
, Vol.22
, No.5
, pp.762
-769
(Sep, 2005)
-
[논문]
문상흡, 민재호, 이진관, 김창구,
Deep Etching of Silicon with Smooth Sidewalls by an Improved Gas-Chopping Process Using a Faraday Cage and a High Bias Voltage
, Journal of Vacuum Science and Technology B
, Vol.23
, No.4
, pp.1405
-1411
(Jul, 2005)
-
[논문]
문상흡, 이진관, 이겨레, 김창구, 민재호,
Improvement of SiO2 Pattern Profiles Etched in CF4 and SF6 Plasmas by Using a Faraday Cage and Neutral Beams
, Surface and Coatings Technology
, Vol.193
, pp.75
-80
(Apr, 2005)
-
[논문]
김창구, 신치범,
Plasma Molding over Surface Topography: Measurement of Energy and Angular Distributions of Ions Extracted through a Large Hole
, Thin Solid Films
, Vol.475
, pp.24
-31
(Mar, 2005)
-
[논문]
문상흡, 이진관, 이겨레, 김창구, 민재호,
Effect of Sidewall Properties on the Bottom Microtrench during SiO2 Etching in a CF4 Plasma
, Journal of Vacuum Science and Technology B
, Vol.23
, No.2
, pp.425
-432
(Mar, 2005)
-
[논문]
이강택, 주현우, 안익성, Zhijian Wu, 김창구, 김중현,
Design of Doped Hybrid Xerogels for a Controlled Release of Brilliant Blue FCF
, Journal of Non-Crystalline Solids
, Vol.342
, pp.46
-53
(Aug, 2004)
-
[논문]
문상흡, 이진관, 이겨레, 김창구, 민재호,
Angular dependence of etch rates in the etching of poly-Si and fluorocarbon polymer using SF6, C4F8, and O2 plasmas
, Journal of Vacuum Science and Technology A
, Vol.22
, No.3
, pp.661
-669
(May, 2004)
-
[논문]
문상흡, 이진관, 이겨레, 김창구, 민재호,
Dependences of bottom and sidewall etch rates on bias voltage and source power during the etching of poly-Si and fluorocarbon polymer using SF6, C4F8, and O2 plasmas
, Journal of Vacuum Science and Technology B
, Vol.22
, No.3
, pp.893
-901
(May, 2004)
-
[논문]
김창구,
Analysis of Langmuir Probe Data in High Density Plasmas
, Korean Journal of Chemical Engineeirng
, Vol.21
, No.3
, pp.746
-751
(May, 2004)
-
[논문]
김창구, 이병석, 박성기, 김일욱, 류현규,
Effect of CH2F2 Addition on a High Aspect Ratio Contact Hole Etching in a C4F6/O2/Ar Plasma
, Electrochemical and Solid-State Letters
, Vol.6
, No.9
(Sep, 2003)
-
[논문]
문상흡, 황성욱, 조병옥, 김창구, 류정현,
Trajectories of Ions inside a Faraday Cage Located in a High Density Plasma Etcher
, Korean Journal of Chemical Engineering
, Vol.20
, No.2
, pp.407
-413
(Feb, 2003)
-
[논문]
김창구, Demetre J.Economou,
Plasma molding over surface topography: Energy and angular distribution of ions extracted out of large holes
, Journal of Applied Physics
, Vol.91
, No.5
, pp.2594
-2603
(Mar, 2002)
- 국내학술논문지
-
[논문]
김창구, 박창진, 김준현,
유연전극을 이용한 대기압 부유전극 유전체 장벽 방전 플라즈마
, Korean Chemical Engineering Research
, Vol.57
, No.3
, pp.432
-437
(Jun, 2019)
-
[논문]
김창구, 조성운, 김준현, 이혜민,
백금 나노입자 전착의 전기화학적 분석
, KOREAN CHEMICAL ENGINEERING RESEARCH(화학공학)
, Vol.53
, No.5
, pp.540
-544
(Oct, 2015)
-
[논문]
김창구, 지정민, 조성운,
Bosch 공정에서 Si 식각속도와 식각프로파일에 대한 Ar 첨가의 영향
, KOREAN CHEMICAL ENGINEERING RESEARCH(화학공학)
, Vol.51
, No.6
, pp.755
-759
(Dec, 2013)
-
[논문]
김창구, 윤형진, 김태호,
Electroless Plating of Co-Alloy Thin Films Using Alkali-Free Chemicals
, The Korean Journal of Chemical Engineering Research
, Vol.45
, No.6
, pp.633
-637
(Dec, 2007)
- 국제학술발표
-
[학술회의]
김창구, 김준현, 박진수,
The use of hexafluoroisopropanol as an alternative to perfluoro compounds for plasma etching of SiO2
, Materials Challenges in Alternative & Renewable Energy (MCARE 2019)
(Aug, 2019)
-
[학술회의]
김창구, 김준현, 박진수,
Plasma etching of SiO2 using hexafluoroisopropanol
, 24th International Symposium on Plasma Chemistry (ISPC 24)
(Jun, 2019)
-
[학술회의]
김창구, 박진수, 김준현,
Fabrication of slanted Si pillars for Antireflective surfaces using plasma etching
, 24th International Symposium on Plasma Chemistry (ISPC 24)
(Jun, 2019)
-
[학술회의]
김창구, 김준현,
Surface texturing with slanted silicon nanopillars to reduce its optical reflectivity
, 21st International Conference on Advanced Materials and Nanotechnology
(Sep, 2018)
-
[학술회의]
김창구, 박진수, 김준현,
Plasma etching of SiO2 perfluorinated and partially fluorinated fluoro ethers
, 7th International Conference on Microelectronics and Plasma Technology
(Jul, 2018)
-
[학술회의]
김창구, 김준현, 박진수,
Angular dependence of SiO2 etch rates in hexafluoroisopropanol plasmas
, 7th International Conference on Microelectronics and Plasma Technology
(Jul, 2018)
-
[학술회의]
김창구,
The use of HFE-347mcc3 plasmas as an alternative to perfluorocarbons to reduce global warming potential during SiO2 contact hole etching
, 9th International Conference on Environmental Engineering and Applications (ICEEA 2018)
(Jul, 2018)
-
[학술회의]
김창구, 김준현, 박진수,
Angular Dependence of Si3N4 Etch rates in C4F6/CH2F2/O2/Ar Plasmas
, 10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2018)
(Mar, 2018)
-
[학술회의]
김창구, 김준현, 신용선,
Fabrication of antireflective Si surfaces using slanted plasma etching
, 10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2018)
(Mar, 2018)
-
[학술회의]
김창구, 김준현, 김가연,
A dielectric barrier discharge system for flexible substrates
, 10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2018)
(Mar, 2018)
-
[학술회의]
김창구, 이혜민,
One-step chemical precipitation of vanadium nitrides for electrochemical capacitors
, 191st International Conference on Chemical and Biochemical Engineering (ICCBE)
(Feb, 2018)
-
[학술회의]
김창구, 김준현,
Antireflective surfaces with Si nanopillars at controllable angles
, 9th International Conference on Nanomaterials - Research & Application (NANOCON)
(Oct, 2017)
-
[학술회의]
김창구, 김준현,
Use of flexible electrodes for a dielectric barrier discharge
, The 10th International Conference on Plasma Science and Applications (ICPSA) 2017
(Oct, 2017)
-
[학술회의]
김창구, 김준현,
Fabrication of antireflection slanted Si pillars using slanted plasma etching
, 7th Central European Symposium on Plasma Chemistry
(Sep, 2017)
-
[학술회의]
김창구, 박창진, 김준현,
Fabrication of superhydrophobic Si surfaces in a plasma etching system
, 7th Central European Symposium on Plasma Chemistry
(Sep, 2017)
-
[학술회의]
김창구, 박창진,
Development of characteristics of a dielectric barrier discharge system having flexible electrodes
, 7th Central European Symposium on Plasma Chemistry
(Sep, 2017)
-
[학술회의]
김창구, 김준현, 박창진,
Low pressure chemical vapor deposition of tin on Ni-Cr wires for fusible resistors
, Global Conference on Engineering and Applied Science (2017 GCEAS)
(Jul, 2017)
-
[학술회의]
김창구, 이경미, 김준현, 강두원, 박창진, 박정근,
Control of the electrical resistivity of Ni-alloy wires by chemical vapor deposition
, Materials Challenges in Alternative & Renewable Energy (MCARE 2017)
(Feb, 2017)
-
[학술회의]
김창구, 박창진,
Mechanism of changes in etch rates of silicon dioxide with ion-incident angle during fluorocarbon plasma etching
, 5th International Conference on System Modeling and Optimization (ICSMO 2017)
(Feb, 2017)
-
[학술회의]
김창구, 김준현,
Effect of discharge gas on the angular dependence of SiO2 etch rates in various fluorocarbon plasmas
, The 6th International Conference on Microelectronics and Plasma Technology (ICMAP 2016)
(Sep, 2016)
-
[학술회의]
김창구, 박창진,
Advanced cyclic etching to reduce the diameter of SiO2 contact holes
, 15th International Conference on Plasma Surface Engineering (PSE 2016)
(Sep, 2016)
-
[학술회의]
김창구, 박정근,
Angular dependence of SiO2 etch rates during fluorocarbon plasma etching
, 15th International Conference on Plasma Surface Engineering (PSE 2016)
(Sep, 2016)
-
[학술회의]
김창구, 김준현,
Use of conventional plasma etching system for the fabrication of superhydrophobic Si surfaces
, 15th International Conference on Plasma Surface Engineering (PSE 2016)
(Sep, 2016)
-
[학술회의]
김창구, 김준현,
Fabrication of single- and multi-directional slanted profiles of Si using plasma etching
, 15th International Conference on Plasma Surface Engineering (PSE 2016)
(Sep, 2016)
-
[학술회의]
김창구, 박창진,
Changes in the angular dependence of SiO2 etch rates with bias voltage in a C4F8 plasma
, 15th International Conference on Plasma Surface Engineering (PSE 2016)
(Sep, 2016)
-
[학술회의]
김창구, 정황보, 이혜민,
A facile synthesis and electrochemical analysis of vanadium nitride for electrochemical capacitors
, 18th Topical Meeting of the International Society of Electrochemistry
(Mar, 2016)
-
[학술회의]
김창구, 정황보, 이혜민,
Environmentally benign synthesis of graphene based binary metal oxides for electrochemical capacitors
, 18th Topical Meeting of the International Society of Electrochemistry
(Mar, 2016)
-
[학술회의]
김창구, 조성운, 김준현,
Fabrication of slanted nanostructures using a Faraday cage system
, 6th International Conference on Nanotechnology (Nanotechnology 2015)
(Nov, 2015)
-
[학술회의]
김창구, 조성운, 김준현,
Fabrication of slanted silicon profiles using plasma etching
, International Conference on Engineering, Technology, and Applied Science (ICETA) 2015
(Apr, 2015)
-
[학술회의]
김창구, 조성운, 김준현, 박정근, 옥승수,
Effect of fluorocarbon discharge gas on the angular dependence of SiO2 etch rates
, 7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
(Mar, 2015)
-
[학술회의]
김창구, 조성운, 김준현,
Multi-directional slanted plasma etching of silicon
, 7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
(Mar, 2015)
-
[학술회의]
김창구, 백창용, 강두원, 이경미, 김준현, 조성운,
Dopantless tin oxide films prepared by LPCVD
, Materials Challenges in Alternative & Renewable Energy (MCARE 2015)
, pp.122
-122
(Feb, 2015)
-
[학술회의]
김창구, 백창용, 강두원, 이경미, 김준현, 조성운,
Effect of deposition temperature on electrical properties of dopantless tin oxide films
, Materials Challenges in Alternative & Renewable Energy (MCARE 2015)
, pp.225
-225
(Feb, 2015)
-
[학술회의]
김창구, 백창용, 강두원, 이경미, 김준현, 조성운,
Electrical properties and surface morphologies of SnO2 films prepared by LPCVD
, 11th International Conference on Nano-Molecular Electronics
, pp.100
-100
(Dec, 2014)
-
[학술회의]
김창구, 조성운,
Oblique plasma etching: Fabrication of single-and multi-directional etch profiles
, 11th International Conference on Nano-Molecular Electronics
, pp.104
-104
(Dec, 2014)
-
[학술회의]
김창구, 정경화, 김상욱, 이혜민,
Pseudocapacitive performance of porous ZrO2-SiO2 sheets doped with WO3 nanoparticles
, Chiba University-Ajou University Symposium 2014
, pp.25
-25
(Dec, 2014)
-
[학술회의]
김창구,
Multi-directional slanted plasma etching
, Chiba University-Ajou University Symposium 2014
, pp.12
-12
(Dec, 2014)
-
[학술회의]
김창구, 백창용, 강두원, 이경미, 조성운, 김준현,
Low pressure chemical vapor deposition of SnO2 films: Temperature dependence of electrical properties
, 11th Korea-Japan Symposium on Materials & Interface
, pp.36
-36
(Nov, 2014)
-
[학술회의]
김창구, 백창용, 강두원, 이경미, 조성운, 김준현,
Low pressure chemical vapor deposition of dopantless tin oxide films
, 11th Korea-Japan Symposium on Materials & Interface
, pp.37
-37
(Nov, 2014)
-
[학술회의]
김창구, 이혜민,
Effects of TTAB concentration on the electrodeposited manganese oxide for electrochemical capacitors
, 65th Annual Meeting of the International Society of Electrochemistry
(Sep, 2014)
-
[학술회의]
김창구, 이혜민, 남궁윤미,
Addition of TTAB as a surfactant for the electrodeposition of cobalt oxide films
, 65th Annual Meeting of the International Society of Electrochemistry
(Sep, 2014)
-
[학술회의]
김창구, 이혜민, 남궁윤미,
Electrodeposition and electrochemical analysis of ternary metal oxides for supercapacitors
, 65th Annual Meeting of the International Society of Electrochemistry
(Sep, 2014)
-
[학술회의]
김창구, 정경화, 김상욱, 이혜민,
A facile synthesis and electrochemical analysis of cobalt hydroxide/graphene nanocomposites
, 65th Annual Meeting of the International Society of Electrochemistry
(Sep, 2014)
-
[학술회의]
김창구, 조성운,
Slanted plasma etching: Fabrication of three-dimensional nanostructures
, 6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
(Mar, 2014)
-
[학술회의]
김창구, 조성운, 김준현,
Dopantless control over the electrical properties of tin oxide films by LPCVD
, 2014 Kyoto-Ajou Joint Symposium on Energy Science
(Feb, 2014)
-
[학술회의]
김창구, 정경화, 김상욱, 이혜민,
Supercapacitive properties of metal oxide-graphene nanocompoites
, 2013 Materials Research Society Fall Meeting
(Dec, 2013)
-
[학술회의]
김창구, 정경화, 김상욱, 이혜민,
Fabrication of metal oxide/graphene nanocomposites for electrochemical capacitors
, 224th Electrochemical Society Meeting
(Oct, 2013)
-
[학술회의]
김창구, 정경화, 김상욱, 이혜민,
One-step synthesis of Co(OH)2/graphene nanocomposites from graphite for electrochemical supercapacitors
, 224th Electrochemical Society Meeting
(Oct, 2013)
-
[학술회의]
김창구, 조성운, 김준현,
Effect of the substrate temperature on the electrical conductivity of tin oxide films by LPCVD
, TACT 2013 International Thin Films Conference
(Oct, 2013)
-
[학술회의]
김창구, 조성운, 김준현,
Characteristics of electrical conductivity of undopped tin oxide films prepared by low pressure chemical vapor deposition
, TACT 2013 International Thin Films Conference
(Oct, 2013)
-
[학술회의]
김창구, 김준현, 조성운,
Angular dependence of etch rates and etch selectivity of Si3N4 in C4F6/Ar/O2/CH2F2 plasmas
, Dry Process Symposium 2013
, pp.137
-138
(Aug, 2013)
-
[학술회의]
김창구, 이혜민,
Electrodeposition of single and binary manganese oxides for electrochemical capacitors
, 9th World Congress of Chemical Engineering
(Aug, 2013)
-
[학술회의]
김창구, 조성운,
Mechanism of SiO2 etching in C4F6/Ar/O2/CH2F2 plasmas
, 9th World Congress of Chemical Engineering
(Aug, 2013)
-
[학술회의]
김창구, 김준현,
Kinetic analysis of tin oxide films prepared by low pressure chemical vapor deposition
, 9th World Congress of Chemical Engineering
(Aug, 2013)
-
[학술회의]
김창구, 조성운, 김준현, 이혜민,
Fabrication of three-dimensional nanostructures using a high-density plasma
, 9th World Congress of Chemical Engineering
(Aug, 2013)
-
[학술회의]
김창구, 김준현, 조성운,
Angular dependence of SiO2 etch rates in C4F6/CH2F2/O2/Ar plasmas
, 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2013)
(Jan, 2013)
-
[학술회의]
이혜민, 김창구,
Electrodeposition and electrochemical analysis binary metal oxides for supercapacitors
, Materials Research Society 2012 Fall Meeting
(Nov, 2012)
-
[학술회의]
김창구, 문상흡, 이진관,
Plasma etching for the fabrication of nanoscale patterns: A new cyclic process for high aspect-ratio SiO2 contact holes
, UKC 2012
(Aug, 2012)
-
[학술회의]
김창구, 이형무,
Development of environmentally benign deep silicon etching using C4F6 plasmas in the deposition step of the Bosch process
, UKC 2012
(Aug, 2012)
-
[학술회의]
김창구, 이혜민,
Electrodeposition of Ni-Mn oxides thin films on a carbon sheet for Electrochemical supercapacitors
, 220th Electrochemical Society Meeting
(Oct, 2011)
-
[학술회의]
김창구, 이혜민, 홍다혜,
Effect of pH and temperature on the electrodeposition of Co-Mn oxide thin films
, 220th Electrochemical Society Meeting
(Oct, 2011)
-
[학술회의]
김창구, 이혜민, 서승혜,
Electrodeposition of cobalt-manganese oxide thin films for supercapacitor electrodes
, 14th Asian Chemical Congress 2011
(Sep, 2011)
-
[학술회의]
김창구, 이혜민,
Preparation of characterization of electrodeposited manganese-nickel oxide films for electrochemical supercapacitors
, 14th Asian Chemical Congress 2011
(Sep, 2011)
-
[학술회의]
Rajagopal, Ganesan, Muthukumar, 김창구,
Optical and Electrical Properties of Pure and Aluminium - Doped Zinc Oxide Thin Film Nanostructures Synthesized by Electrodeposition Technique
, International Conference on Nanoscience and Nanotechnology (ICNN 2011)
(Jul, 2011)
-
[학술회의]
김창구, 조성운,
Angular dependence of Si3N4 etch rates and SiO2-to-Si3N4 etch selectivity in C4F6/Ar/O2/CH2F2 plasmas
, 38th IEEE International Conference on Plasma Science
(Jun, 2011)
-
[학술회의]
김창구, 조성운, 김준현,
Control of the contact hole diameter using inductively coupled fluorocarbon and hydrocarbon plasmas
, 38th IEEE International Conference on Plasma Science
(Jun, 2011)
-
[학술회의]
김창구, 서승혜, 이혜민,
Characterization of Electrolessly Plated NiMoP Thin Films Using Alkali-Metal-Free Chemicals
, The 61st Annual Meeting of the International Society of Electrochemistry
(Sep, 2010)
-
[학술회의]
김창구, 서승혜, Kandalkar, 이혜민,
Electrodeposition of Cobalt Oxide Electrode for Supercapacitor Applications
, The 61st Annual Meeting of the International Society of Electrochemistry
(Sep, 2010)
-
[학술회의]
김창구, 이혜민, 손영선,
Effect of pH and Temperature of the Electrolyte on the Electrodeposition of CoWP Films Using Alkali-Metal-Free Precursors
, 217th Electrochemical Society Meeting
(Apr, 2010)
-
[학술회의]
김창구, 이진관, 문상흡, 조성운,
Effect of CH2F2 addition on the angular dependence of Si3N4 etch rates and SiO2-to-Si3N4 etch selectivity in a C4F6/Ar/O2 plasma
, 2nd international symposium on advanced plasma science and its applications for nitrides and nanomaterials (ISPlasma 2010)
(Mar, 2010)
-
[학술회의]
김창구, 신우식, 지정민,
Improvement of RIE lag in high aspect ratio Si etching
, 2nd international symposium on advanced plasma science and its applications for nitrides and nanomaterials
(Mar, 2010)
-
[학술회의]
김창구, 지정민, Dulal, 신우식,
Structural and morphological characteristics of the electrodeposited CoWP thin films
, 216th Electrochemical Society
(Oct, 2009)
-
[학술회의]
김창구, 우상호, 김해원, 엄평용, 지정민, 김일욱,
Formation and characterization of thin silicon dioxide films obtained by inductively coupled high-density plasmas using a dual rotated spiral antenna system
, 216th Electrochemical Society
(Oct, 2009)
-
[학술회의]
김창구, 이혜민, 손영선,
Use of alkali-metal-free chemicals in the electrodeposition of CoWP capping layers for Cu interconnection
, 216th Electrochemical Society
(Oct, 2009)
-
[학술회의]
김창구, 조성운, Dulal, 신우식,
Fabrication and characterization of NiMoP thin films fabricated using an electrochemical method
, 216th Electrochemical Society
(Oct, 2009)
-
[학술회의]
김창구, 이혜민, 손영선,
Formation and characterization of nanostructured TiNi films fabricated using an electrochemical method
, 216th Electrochemical Society
(Oct, 2009)
-
[학술회의]
김창구, 남궁윤미, 이혜민, 권혁규,
Characteristics of Etch Profiles Processed with the Bosch Process Using SF6/C4F8 and SF6/C4F6 Plasmas
, ICMAP 2008
, pp.179
-179
(Aug, 2008)
-
[학술회의]
문상흡, 이진관, 김창구,
A Novel Etching Process to Obtain a Bowing-Free SiO2 Contact Hole
, ICMAP 2008
, pp.180
-180
(Aug, 2008)
-
[학술회의]
김창구, Dulal, 이혜민, 신치범, 남궁윤미,
Effect of Electrolyte Concentration on Electrodeposition of NiMoP Thin Films as Capping Layers
, 213th Electrochemical Society Meeting
(May, 2008)
-
[학술회의]
김창구, 윤형진, Dulal, 신치범, 박병훈,
Improvement of Corrosion Protective Properties Using Electrodeposited CoWP Coating
, 213th Electrochemical Society Meeting
(May, 2008)
-
[학술회의]
김창구, Mahapatra, 김일욱, 남궁윤미,
Investigation of the Magnetic Properties of Electrodeposited CoWP Films
, 213th Electrochemical Society Meeting
(May, 2008)
-
[학술회의]
김창구, Mahapatra, 우상호, 권혁규, 박병훈,
Control of the Electrical and Optical Properties of Plasma Polymerized Fluorocarbon Films
, 213th Electrochemical Society Meeting
(May, 2008)
-
[학술회의]
김창구, 이혜민, Dulal, 권혁규,
Electroless Deposition of CoWP Capping Layers Using Alkali-Metal-Free Chemicals
, 213th Electrochemical Society Meeting
(May, 2008)
-
[학술회의]
김창구, 김일욱, 최형수, 엄평용, 이동근, 조성길, 우상호, 김해원,
Structural and Morphological Properties of Nitrogen Doped Polysilicon for Advanced Gate Material
, 212th Meeting of the Electrochemical society
(Oct, 2007)
-
[학술회의]
김창구, 윤형진, 김태호, 박창한, 신치범, S.M.S.I.Dulal,
Electrodeposition of CoWP Thin Films on Copper Stacked on Silicon Wafer
, 212th Meeting of the Electrochemical society
(Oct, 2007)
-
[학술회의]
김창구, 전원진, 윤형진, S.M.S.I.Dulal, 남궁윤미,
Effect of Deposition Modes on Composition and Microstructure of Electrodeposited CoWP Film
, 212th Meeting of the Electrochemical society
(Oct, 2007)
-
[학술회의]
김창구, 우상호, 김일욱, 권혁규, 이형무,
Gas-Chopping Etching of Silicon Using SF6/C4F8 and SF6/C4F6 Plasmas
, 6th Asian-European International Conference on Plasma Surface Engineering
, pp.28
-28
(Sep, 2007)
-
[학술회의]
문상흡, 장일용, 이진관, 김창구, 이승행,
Angular Dependence of Si3N4 Etch Rates and SiO2-TO-Si3N4 Etch Selectivity in a C4F8/Ar Plasma
, 6th Asian-European International Conference on Plasma Surface Engineering
, pp.96
-96
(Sep, 2007)
-
[학술회의]
김창구, 박창한, 이형무, 유재석,
Measurement of Thermal Properties of Thin Films Using the Photothermal Deflection and Photothermal Displacement Methods
, 2007 MRS Spring Meeting
, pp.764
-765
(Apr, 2007)
-
[학술회의]
김창구, 이형무, 박창한,
Environment-Friendly Plasma Etching of High Aspect Ratio Silicon by a Gas-Chopping Process
, 2007 MRS Spring Meeting
, pp.51
-52
(Apr, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 전원진, 신치범,
Controlling Size, Shape, and Distribution of Platinum Nanoparticles Electrodeposited on Carbon Supports
, 2007 MRS Spring Meeting
, pp.614
-614
(Apr, 2007)
-
[학술회의]
김창구, 윤형진, 김태호,
Electrical and Chemical Characteristics of CoWP Capping Layers Deposited on Cu by Electroless Plating
, 2007 MRS Spring Meeting
, pp.66
-66
(Apr, 2007)
-
[학술회의]
김창구, 윤형진, 김태호, 신치범, S.M.S.I.Dulal,
Development of a Bath and Optimization of Electrochemical Parameters for the Deposition of Platinum Nanoparticles on Graphite
, 2007 MRS Spring Meeting
, pp.615
-615
(Apr, 2007)
-
[학술회의]
김창구, 신치범, 이형무, 박창한, 윤형진, 김상인, 김태호,
Etching of Poly-Si with Atomic Scale Accuracy in Inductively Coupled Ar and He Plasmas
, 8th International Conference on Solid-State and Integrated-Circuit Technology
(Oct, 2006)
-
[학술회의]
문상흡, 장일용, 이진관, 김창구, 이승행,
Angular Dependence of the SiO2-to-Si3N4 Etch Selectivity in C4F6/O2/Ar/CH2F2 Plasmas
, International Union for Vacuum Science, Technique, and Applications (IUVSTA) Executive Council Meeti
(Sep, 2006)
-
[학술회의]
김창구, 김태호, 김일욱, 윤형진, 이형무, 신치범, 박창한,
Etch Characteristics and Mechanisms in Atomic Scale Etching of Poly-Silicon
, 209th Meeting of the Electrochemical Society
(May, 2006)
-
[학술회의]
신치범, 윤형진, 전상훈, 김창구, 류홍석,
Modeling of the Charge-Discharge Behavior of a 12-V Automotive Lead-Acid Battery
, 209th Meeting of the Electrochemical Society
(May, 2006)
-
[학술회의]
김창구, 김일욱, 박창한, 윤형진, 신치범, 김태호,
Dependences of the Ion Mass and the Ion Incident Angle on Etch Rates in Atomic Scale Etching of Poly-Si
, 14th Gaseous Electronics Meeting
(Feb, 2006)
-
[학술회의]
김창구, 김일욱, 민재호, 신치범, 문상흡,
Atomic Scale Etching of Poly-Si in Inductively Coupled Ar and He Plasmas
, AVS 52nd International Symposium
(Oct, 2005)
-
[학술회의]
신치범, 정승면, 김성태, 김창구, 이대훈,
Modeling of the Dynamics Behavior of a 12-V Automotive Lead-Acid Battery
, 207th Meeting of the Electrochemical Society
(May, 2005)
-
[학술회의]
김창구, 김일욱, 류현규, 신치범,
Aluminum Dual Damascene Process for the Fabrication of Sub-100nm Memory Devices
, 207th Meeting of the Electrochemical Society
(May, 2005)
-
[학술회의]
김창구, 김일욱, 류현규, 신치범,
High Aspect Ratio Contact Hole Etching in C4/F6/O2/Ar/CH2F2 and c-C4/F8/O2/Ar/CH2F2 Plasmas
, American Vacuum Society 51st International Symposium
(Nov, 2004)
-
[학술회의]
김창구, 김일욱, 류현규, 신치범,
Aluminum dual damascene metallization for sub-100 nm memory devices
, 6th Japan-Korea Symposium on Materials and Interfaces
(Oct, 2004)
-
[학술회의]
김창구, 김일욱, 유현구, 신치범,
The Use of C4F6 Plasmas as an Alternative to Perfluorocarbons for High Aspect Ratio Contact Hole Etching
, 206th Meeting of the Electrochemical Society
(Oct, 2004)
-
[학술회의]
신치범, 조원일, 서동진, 조병원, 김창구, 전상훈,
Modeling of a Capacitive Deionization Process
, 205th Meeting of the Electrochemical Society
(May, 2004)
-
[학술회의]
문상흡, 이진관, 이겨레, 김창구, 민재호,
Improvement of Anisotropy and Aspect Ratio of a Pattern Etched in Bosch Process by Using a Faraday Cage
, American Vacuum Society 50th International Symposium
, Vol.1
, No.1
, pp.72
-72
(Nov, 2003)
-
[학술회의]
신치범, 최경희, 신현철, 김홍건, 김창구, 이종협,
A Study on the Pollutant Fate Based on Multimedia Urban Model
, Annual Meeting of American Institute of Chemical Engineers
(Nov, 2003)
-
[학술회의]
문상흡, 이진관, 이겨레, 김창구, 민재호,
Improvement of SiO2 Pattern Profile Etched in Ar and CF4 Plasmas by Using a Faraday Cage and Neutralized Ions
, 4th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2003)
, pp.334
-334
(Oct, 2003)
-
[학술회의]
김창구, Demetre J.Economou, 신치범,
Plasma Molding over Surface Topography: Measurement of Energy and Angular Distributions of Ions Extracted through a Large Hole
, 4th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2003)
, pp.306
-306
(Oct, 2003)
- 국내학술발표
-
[학술회의]
김창구, 김준현, 박진수,
Plasma etching of SiO2 using perfluoropropyl vinyl ether
, 한국화학공학회 2019년 봄 학술대회
(Apr, 2019)
-
[학술회의]
김창구, 김준현, 신용선,
Control of ozone concentration in dielectric barrier discharge system
, 한국화학공학회 2019년 봄 학술대회
(Apr, 2019)
-
[학술회의]
김창구, 김준현, 박진수,
Angular dependences of SiO2 etching in CF4, C2F6, and C4F8 plasmas
, 제26회 한국반도체학술대회
(Feb, 2019)
-
[학술회의]
김창구, 김준현, 박진수,
Mechanism of SiO2 etching in heptafluoropropyl methyl ether plasmas
, 13th Koea-Japan Symposium on Materials and Interfaces
(Nov, 2018)
-
[학술회의]
김창구, 김준현, 신용선,
The use of TiO2 nanoparticles to reduce ozone concentration in dielectric barrier discharge system
, 한국화학공학회 2018년 가을 학술대회
(Oct, 2018)
-
[학술회의]
김창구, 김준현, 박진수,
Plasma etching of SiO2 using hexafluoroisopropanol
, 한국화학공학회 2018년 가을 학술대회
(Oct, 2018)
-
[학술회의]
김창구, 김준현, 박진수,
Use of heptafluoroisopropyl methyl ether for plasma etching of SiO2
, 한국화학공학회 2018년 봄 학술대회
(Apr, 2018)
-
[학술회의]
김창구, 김가연,
Reduction of O3 concentration in a dielectric barrier discharge
, 한국화학공학회 2018년 봄 학술대회
(Apr, 2018)
-
[학술회의]
김창구, 김준현, 박진수,
Plasma etching of SiO2 using low-GWP etchants
, 한국화학공학회 2018년 봄 학술대회
(Apr, 2018)
-
[학술회의]
김창구, 박창진,
Electroless plating of copper on PET without using a seed layer
, 한국화학공학회 2017년 가을 총회 및 학술대회
(Oct, 2017)
-
[학술회의]
김창구, 박창진,
Effect of dielectric materials on characteristics of a dielectric barrier discharge system
, 한국화학공학회 2017년 가을 총회 및 학술대회
(Oct, 2017)
-
[학술회의]
김창구, 김준현,
Plasma etching for the fabrication of slanted Si rods as low reflection surfaces
, 한국화학공학회 2017년도 봄 학술대회
(Apr, 2017)
-
[학술회의]
김창구, 김준현,
Superhydrophobic Si surfaces with plasma-treated microrods
, 한국화학공학회 2017년도 봄 학술대회
(Apr, 2017)
-
[학술회의]
김창구, 김준현, 박창진,
LPCVD of tin on Ni-based wires to control their electrical resistivity
, 한국화학공학회 2017년도 봄 학술대회
(Apr, 2017)
-
[학술회의]
김창구, 박창진,
Dependence of SiO2 etch rates on the ion-incident angle at various bias voltages in a C4F8 plasma
, 한국화학공학회 2017년도 봄 학술대회
(Apr, 2017)
-
[학술회의]
김창구, 박창진,
Control of the contact hole diameter by advanced cyclic etching
, 한국화학공학회 2016년 가을 학술대회
(Oct, 2016)
-
[학술회의]
김창구, 이혜민, 박창진,
Fabrication of flexible electrodes by a palladium-free electroless plating
, 한국화학공학회 2016년 가을 학술대회
(Oct, 2016)
-
[학술회의]
김창구, 김준현, 박정근,
Effect of bias voltage on the angular dependence of SiO2 etch rates in fluorocarbon plasmas
, 한국화학공학회 2016년 봄 총회 및 학술대회
(Apr, 2016)
-
[학술회의]
김창구, 이혜민, 박창진,
Electroless plating of copper on a PET film for flexible electrodes
, 한국화학공학회 2016년 봄 총회 및 학술대회
(Apr, 2016)
-
[학술회의]
김창구, 이경미, 강두원, 박정근, 김준현,
Surface treatment of Ni-Cr wires for fusible resistors
, 한국화학공학회 2016년 봄 총회 및 학술대회
(Apr, 2016)
-
[학술회의]
김창구, 박정근, 박창진,
Fabrication and characterization of double structured tin oxide films
, 한국화학공학회 2016년 봄 총회 및 학술대회
(Apr, 2016)
-
[학술회의]
김창구, 이경미, 강두원, 박정근, 김준현,
Effect of temperatures on the electrical resistivity of Ni-Cr wires
, 한국화학공학회 2015년 가을 학술대회
(Oct, 2015)
-
[학술회의]
김창구, 이경미, 강두원, 박정근, 김준현,
Control of the electrical resistivity of Ni-Fe wires for fusible resistors
, 한국화학공학회 2015년 가을 학술대회
(Oct, 2015)
-
[학술회의]
김창구, 박정근, 김준현,
Effect of O2 flow rates on the electrical properties of tin oxide films by LPCVD
, 한국화학공학회 2015년 가을 학술대회
(Oct, 2015)
-
[학술회의]
김창구, 조성운, 김준현,
Superhydrophobic wetting behaviour of Si surfaces having microrods
, 한국화학공학회 2015년 가을 학술대회
(Oct, 2015)
-
[학술회의]
김창구, 김준현, 조성운,
A cyclic process to control the diameter of SiO2 contact holes
, 한국화학공학회 2015년도 봄 학술대회
(Apr, 2015)
-
[학술회의]
김창구, 김준현, 조성운, 박정근,
Effect of gas composition on the angular dependence of SiO2 etch rates in fluorocarbon plasmas
, 한국화학공학회 2015년도 봄 학술대회
(Apr, 2015)
-
[학술회의]
김창구, 김준현, 백창용, 강두원, 이경미, 박정근, 조성운,
Surface treatment to control the electrical resistivity of metal
, 한국화학공학회 2015년도 봄 학술대회
(Apr, 2015)
-
[학술회의]
김창구, 조성운, 김준현,
Effect of bias voltage on the angular dependence of SiO2 etch rates in C4F8 plasmas
, 한국화학공학회 2015년도 봄 학술대회
(Apr, 2015)
-
[학술회의]
김창구, 조성운, 김준현,
Angular dependence of Si3N4 etch rates in fluorocarbon plasmas
, 한국화학공학회 2015년도 봄 학술대회
(Apr, 2015)
-
[학술회의]
김창구, 김준현, 조성운,
Etch mechanism of Si3N4 in a C4F6/Ar/O2/CH2F2 plasma
, 한국화학공학회 2015년도 봄 학술대회
(Apr, 2015)
-
[학술회의]
김창구, 백창용, 강두원, 이경미, 김준현, 조성운,
LPCVD of tin oxide films: Effect of the substrate temperature on the electrical properties
, 한국화학공학회 2014년 가을 학술대회
, pp.355
-355
(Oct, 2014)
-
[학술회의]
김창구, 조성운,
Control of the contact hole diameter in C4F6/Ar/O2/CH2F2 plasmas
, 한국화학공학회 2014년 가을 학술대회
, pp.126
-126
(Oct, 2014)
-
[학술회의]
김창구, 조성운, 김준현,
Angular dependence of SiO2 etch rate in fluorocarbon plasmas
, 한국화학공학회 2014년 가을 학술대회
, pp.341
-341
(Oct, 2014)
-
[학술회의]
김창구, 김준현, 조성운,
Directional slanted plasma etching of silicon under practical plasma processing conditions
, 한국화학공학회 2014년 가을 학술대회
, pp.355
-355
(Oct, 2014)
-
[학술회의]
김창구, 조성운,
Effect of F/C ratio in discharge gases on the angular dependence of etch rates of SiO2
, 한국화학공학회 2014년 봄 학술대회
, pp.322
-322
(Apr, 2014)
-
[학술회의]
김창구, 김준현,
Experimental and computational analysis on the deposition of tin oxide films by LPCVD
, 한국화학공학회 2014년 봄 학술대회
, pp.304
-304
(Apr, 2014)
-
[학술회의]
김창구, 조성운,
A novel process for the fabrication of three-dimensional Si nanostructures
, 한국화학공학회 2014년 봄 학술대회
, pp.294
-294
(Apr, 2014)
-
[학술회의]
김창구, 남궁윤미, 이혜민,
Electrochemical analysis of manganese oxide supercapacitors in 1,3-alkylimidazolum-based ionic liquids
, 한국화학공학회 2014년 봄 학술대회
, pp.309
-309
(Apr, 2014)
-
[학술회의]
김창구, 김준현,
Dependence of the electrical properties of tin oxide films on the substrate temperature
, 한국화학공학회 2014년 봄 학술대회
, pp.293
-293
(Apr, 2014)
-
[학술회의]
김창구, 조성운,
Mechanism of SiO2 etching in fluorocarbon plasmas
, 한국에너지공학회 2014년도 춘계학술발표회
, pp.144
-144
(Apr, 2014)
-
[학술회의]
김창구, 김준현,
Reaction kinetics of tin oxide films prepared by LPCVD
, 한국에너지공학회 2014년도 춘계학술발표회
, pp.145
-145
(Apr, 2014)
-
[학술회의]
김창구, 김준현, 이진주,
Low pressure chemical vapor deposition of tin oxide films and their morphological and electrical properties
, 한국화학공학회 2013년도 봄 총회 및 학술대회
, pp.300
-300
(Apr, 2013)
-
[학술회의]
김창구, 조성운,
Slanted plasma etching for the fabrication of copper nanorods
, 한국화학공학회 2013년도 봄 총회 및 학술대회
, pp.272
-272
(Apr, 2013)
-
[학술회의]
김창구, 김준현,
Kinetics and mechanisms for the deposition of tin oxide films by low pressure chemical vapor deposition
, 한국화학공학회 2013년도 봄 총회 및 학술대회
, pp.274
-274
(Apr, 2013)
-
[학술회의]
김창구, 이혜민,
Characterization of binary metal oxides electrodeposited on carbon sheets for supercapacitors
, 한국전기화학회 2013년도 춘계총회 및 학술발표회
, pp.226
-226
(Apr, 2013)
-
[학술회의]
김창구, 이혜민,
Electrodeposition of binary metal oxides for supercapacitors
, 한국전기화학회 2012년 추계 학술발표회
(Nov, 2012)
-
[학술회의]
김창구, 김준현, 조성운, 이진주,
Effect of the O2 flow rate on tin oxide films prepared by low pressure chemical vapor deposition
, 한국화학공학회 2012년 가을 학술대회
(Oct, 2012)
-
[학술회의]
김창구, 강두원, 백창용, 김준현, 조성운,
Reaction mechanism of tin oxide films deposited by low pressure chemical vapor deposition
, 한국화학공학회 2012년 가을 학술대회
(Oct, 2012)
-
[학술회의]
김창구, 조성운,
Fabrication of three dimensional Cu nanostructures
, 한국화학공학회 2012년 봄 학술대회
(Apr, 2012)
-
[학술회의]
김창구, 조성운, 김준현,
Control of the roughness on the sidewall of Si trenches during the Bosch process
, 한국화학공학회 2012년 봄 학술대회
(Apr, 2012)
-
[학술회의]
김창구, 김준현, 조성운,
Reduction of contact hole diameter by alternating etching and deposition using a fluorocarbon plasma
, 한국화학공학회 2011년 가을 학술대회
(Oct, 2011)
-
[학술회의]
김창구, 이혜민, 서승혜,
Pseudocapacitive properties of electrodeposited Co/Mn composite oxides for electrochemical capacitors
, 한국화학공학회 2011년 가을 학술대회
(Oct, 2011)
-
[학술회의]
김창구, 이혜민,
Effect of process variables on the electrodeposition of manganese-nickel oxide films for supercapacitors
, 한국전기화학회 2011년 추계 학술발표대회
(Oct, 2011)
-
[학술회의]
김창구, 김준현, 조성운,
Control of the contact hole diameter using inductively coupled fluorocarbon and hydrocarbon plasmas
, 한국화학공학회 2011년도 봄 학술대회
(Apr, 2011)
-
[학술회의]
김창구, 조성운,
The role of steady-state fluorocarbon film during SiO2 etching in C4F6/Ar/O2/CH2F2 plasmas
, 한국화학공학회 2011년도 봄 학술대회
(Apr, 2011)
-
[학술회의]
김창구, 서승혜, 이혜민,
Characterization of Mn-Ni oxides thin films electrodeposited on carbon sheet
, 한국화학공학회 2011년도 봄 학술대회
(Apr, 2011)
-
[학술회의]
김창구, 이혜민, 서승혜,
Preparation and characterization of electrodeposited Co-Mn composite oxide thin films for Pseudocapacitor application
, 한국화학공학회 2011년도 봄 학술대회
(Apr, 2011)
-
[학술회의]
김창구, 조성운,
Effect of CH2F2 addition on angular dependence of SiO2 etching in a C4F6/O2/Ar plasma
, 한국화학공학회 2010년도 가을 학술대회
(Oct, 2010)
-
[학술회의]
김창구, 신우식,
Control of RIE lag in Si etching
, 한국화학공학회 2010년도 가을 학술대회
, pp.320
-320
(Oct, 2010)
-
[학술회의]
김창구, 이혜민, 서승혜, 손영선,
Corrosion behavior of CoWP films electrodeposited using alkali-free chemicals
, 한국화학공학회 2010년도 가을 학술대회
, pp.326
-326
(Oct, 2010)
-
[학술회의]
김창구, 이혜민, 손영선,
Electrochemical characteristic of electrodeposited CoWP films
, 한국화학공학회 2010년 봄 학술대회
(Apr, 2010)
-
[학술회의]
김창구, 조성운,
Angular dependence of SiO2 etch rates in C4F6/Ar/O2 and C4F6/Ar/O2/CH2F2 plasmas
, 한국화학공학회 2010년 봄 학술대회
(Apr, 2010)
-
[학술회의]
김창구, S.G.Kandalkar,
Porous nanostructured Co3O4/NiO composite electrode for supercapacitors
, 한국화학공학회 2010년 봄 학술대회
(Apr, 2010)
-
[학술회의]
김창구, S.G.Kandalkar, 서승혜,
Preparation and characterization of chemically deposited Co-Ni composite oxide thin films for supercapacitor application
, 한국화학공학회 2010년 봄 학술대회
(Apr, 2010)
-
[학술회의]
김창구, 이혜민,
Electroless plating of NiMoP capping layers using alkali-free chemicals
, 한국화학공학회 2010년도 봄 학술대회
(Apr, 2010)
-
[학술회의]
김창구, 조성운, 이진관, 문상흡,
Angular dependence of Si3N4 etch rates and SiO2-to-Si3N4 etch selectivity in a C4F6/Ar/O2/CH2F2 plasma
, 한국화학공학회 2009년도 가을 학술대회
(Oct, 2009)
-
[학술회의]
김창구, 이혜민, 손영선,
Shape and size control of platinum nanoparticles electrodeposited on graphite
, 한국화학공학회 2009년도 가을 학술대회
(Oct, 2009)
-
[학술회의]
김창구, 지정민, 이혜민, 손영선, 신우식,
Electrochemical analysis of CoWP thin films electrodeposited using alkali-free precursors
, 한국화학공학회 2009년도 가을 학술대회
(Oct, 2009)
-
[학술회의]
김창구, 지정민, 조성운,
Characteristics of fluorocarbon films deposited in perfluorocarbon and unsaturated fluorocarbon plasmas
, 한국화학공학회 2009년 봄 학술대회
, pp.287
-287
(Apr, 2009)
-
[학술회의]
김창구, 윤형진, Dulal, 남궁윤미,
Electrodeposition and characterisation of amorphous NiMoP thin films
, 한국화학공학회 2009년 봄 학술대회
, pp.322
-322
(Apr, 2009)
-
[학술회의]
김창구, 김일욱, 엄평용, 신우식, 우상호,
Characteristics of double cylindrical coils as an inductively coupled plasma source
, 한국화학공학회 2009년 봄 학술대회
, pp.287
-287
(Apr, 2009)
-
[학술회의]
김창구, 이혜민, Dulal, 손영선,
Electrodeposition of CoWP Thin Films Using Alkali-Free Chemicals
, 한국화학공학회 2009년 봄 학술대회
, pp.288
-288
(Apr, 2009)
-
[학술회의]
김창구, 이혜민, Dulal, 손영선,
Electrochemical deposition of platinum nanoparticles on graphite with Polyvinylpyrrolidone
, 한국화학공학회 2009년 봄 학술대회
, pp.288
-288
(Apr, 2009)
-
[학술회의]
김창구, 지정민, 조성운,
Characteristics of deep Si etching using the advanced Bosch process in PFC- and UFC- containing plasmas
, 한국화학공학회 2009년 봄 학술대회
, pp.287
-287
(Apr, 2009)
-
[학술회의]
김창구, 이혜민, Dulal, 손영선,
Electrodeposition of platinum nanoparticles on carbon supports with polyvinylpyrrolidone
, 한국공업화학회 2009년 춘계 학술대회
, pp.119
-119
(Apr, 2009)
-
[학술회의]
김창구, 이혜민, Dulal, 손영선,
Effect of process variables on the properties of electrodeposited alkali-free CoWP films
, 한국공업화학회 2009년 춘계 학술대회
, pp.111
-111
(Apr, 2009)
-
[학술회의]
김창구, 지정민, 권혁규,
Characteristics of fluorocarbon thin films deposited in C4F8 and C4F6 plasmas
, 한국화학공학회 2008년 가을 학술대회
, pp.314
-314
(Oct, 2008)
-
[학술회의]
김창구, 이혜민, 남궁윤미,
Development of an alkali-free bath for the electrodeposition of Co-W-P thin films
, 한국화학공학회 2008년 가을 학술대회
, pp.316
-316
(Oct, 2008)
-
[학술회의]
김창구, 이혜민, 남궁윤미,
Electrodeposition of nanostructured NiTi films
, 한국화학공학회 2008년 가을 학술대회
, pp.334
-334
(Oct, 2008)
-
[학술회의]
김창구, 지정민, 권혁규,
Effects of power and pressure on the optical and electrical properties of fluorocarbon films
, 한국화학공학회 2008년 가을 학술대회
, pp.314
-314
(Oct, 2008)
-
[학술회의]
김창구, 이혜민, 남궁윤미,
Behavior of the Potential and Current Density During Electrodeposition of CoWP Thin Films
, 한국공업화학회 2008년 봄 학술대회
(May, 2008)
-
[학술회의]
김창구, 이혜민, 남궁윤미,
Electroless Plating of CoWP and NiMoP Films for Capping Layers in Cu Interconnection
, 한국공업화학회 2008년 봄 학술대회
(May, 2008)
-
[학술회의]
김창구, 박병훈, 권혁규,
Optimization of Deep Si Etching Using SF6/C4F8 and SF6/C4F6 Plasmas
, 한국공업화학회 2008년 봄 학술대회
(May, 2008)
-
[학술회의]
김창구, 박병훈, Mahapatra, 권혁규,
Insulating Properties of Fluorocarbon Films Deposited in C4F8 Plasmas
, 한국공업화학회 2008년 봄 학술대회
(May, 2008)
-
[학술회의]
김창구, Mahapatra, 남궁윤미,
Dependence of magnetic properties of CoWP films on the electrolyte concentration
, 한국화학공학회 2008년 봄 학술대회
(Apr, 2008)
-
[학술회의]
김창구, 박병훈, 우상호, 권혁규,
Deep Si Etching using SF6/C4F8 and SF6/C4F6 Plasmas
, 한국화학공학회 2008년 봄 학술대회
(Apr, 2008)
-
[학술회의]
김창구, 남궁윤미, 신치범,
Effect of Potential and Current Density on CoWP Electrodespotion
, 한국화학공학회 2008년 봄 학술대회
, pp.343
-343
(Apr, 2008)
-
[학술회의]
김창구, 이혜민,
Comparison of Electrolessly Plated CoWP and NiMoP Capping Layers Using Alkali-Free Chemicals
, 한국화학공학회 2008년 봄 학술대회
(Apr, 2008)
-
[학술회의]
김창구, 박병훈, Mahapatra, 권혁규,
Electrical and Optical Properties of Fluorocarbon Films Deposited in C4F8 Plasmas
, 한국화학공학회 2008년 봄 학술대회
(Apr, 2008)
-
[학술회의]
김창구, Mahapatra, 이혜민,
Size control of nano structured TiNi alloy by variation of the electrolyte concentration
, 한국화학공학회
(Apr, 2008)
-
[학술회의]
김창구, 우상호, 이형무, 최형수, 김해원, 엄평용, 이동근, 조성길, 권혁규, 김일욱,
Structural and Morphongical Properties of Nitrogen Doped Polysilicon
, 한국화학공학회 2007년 가을 학술대회
, pp.282
-282
(Oct, 2007)
-
[학술회의]
김창구, S.M.S.I. Dulal, 김태호,
Electroless Plating of CoWP Thin Films Using Alkali-Free Chemicals
, 한국화학공학회 2007년 가을 학술대회
, pp.282
-282
(Oct, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 김태호,
Effects of pH and Temperature on Electroless Plating of CoWP Thin Films for Cu Interconnection
, 한국화학공학회 2007년 가을 학술대회
, pp.190
-190
(Oct, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 이혜민, 남궁윤미, 윤형진,
Development of electrolytes for electrodeposition of NiMoP thin films
, 한국화학공학회 2007년 가을학술대회
, pp.284
-284
(Oct, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 윤형진, 신치범, 남궁윤미,
Effect of Process Variables on Electrodeposition of NiMoP Films
, 한국화학공학회 2007년 가을 학술대회
, pp.282
-282
(Oct, 2007)
-
[학술회의]
김창구, 유재석, 박창한, 김현정,
Experimental Determination of Thermal Conductivity of Multilayered Thin Films Using Photothermal Effect
, 한국화학공학회 2007년 가을 학술대회
, pp.267
-267
(Oct, 2007)
-
[학술회의]
김창구, 윤형진, S.M.S.I.Dulal, 신치범,
Structural and Morphological Characterization of Electrodeposited CoWP Thin Films
, 한국화학공학회 2007년 가을 학술대회
, pp.276
-276
(Oct, 2007)
-
[학술회의]
김창구, 윤형진, S.M.S.I.Dulal, 신치범,
Characterization of Corrosion Protective and Mechanical Properties of Electrodeposited CoWP Coatings
, 한국화학공학회 2007년 가을 학술대회
, pp.188
-188
(Oct, 2007)
-
[학술회의]
김창구, 김일욱, 이형무, 권혁규, 우상호,
Investigation of Etch Characteristics of Deep Si Etching in PFC- and UFC-containing Plasmas
, 한국화학공학회 2007년 가을 학술대회
, pp.287
-287
(Oct, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 윤형진, 이혜민, 권혁규, 남궁윤미,
Effect of Electrolyte Concentration on Electrodeposition of NiMoP Amorphous Thin Films
, 한국전기화학회 2007년 추계학술대회
, pp.95
-95
(Oct, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 이형무, 김태호, 박창한,
Development of Electroless Plating of Capping Layers by Using Alkali-Free Chemicals
, 한국전기화학회 2007년 추계학술대회
, pp.94
-94
(Oct, 2007)
-
[학술회의]
김창구, 윤형진, S.M.S.I.Dulal, 신치범,
Physical and Chemical Properties of CoWP Coatings Electrodeposited on Carbon Steel
, 한국전기화학회 2007년 추계학술대회
, pp.104
-104
(Oct, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 윤형진, 신치범,
Electrodeposition of CoWP Diffusion Barrier Layer on Cu Substrate
, 한국공업화학회 2007년 봄 학술대회
, pp.100
-100
(May, 2007)
-
[학술회의]
김창구, K.Nadiia, 강진영, 함승주, 오윤진, 정명기, 정찬화, 이형무, 백승준,
Separation of Nanoparticles in Nanochannels Using Electro-osmotic Force
, 한국화학공학회 2007년 봄 학술대회
, pp.148
-148
(Apr, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 윤형진, 신치범,
Electrodeposition of CoWP Thin Films on Copper Line on p-type Silicon Wafer
, 한국화학공학회 2007년 봄 학술대회
, pp.263
-263
(Apr, 2007)
-
[학술회의]
김창구, 이형무, 권혁규,
Characteristics of Polymer Films Deposited in PFC- and UFC-containing Plasmas During the Bosch Process
, 한국화학공학회 2007년 봄 학술대회
, pp.273
-273
(Apr, 2007)
-
[학술회의]
김창구, 이형무,
Comparison of Etch Characteristics in Deep Si Etching Using PFC- and UFC-containing Plasmas
, 한국화학공학회 2007년 봄 학술대회
, pp.267
-267
(Apr, 2007)
-
[학술회의]
김창구, 윤형진, 김태호,
Electroless Plating of Capping Layers for Copper Interconnection Using Alkali Metal-Free Chemicals
, 한국화학공학회 2007년 봄 학술대회
, pp.264
-264
(Apr, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 윤형진, 신치범,
Electrochemical Deposition of Platinum Nanoparticles on Carbon Supports
, 한국화학공학회 2007년 봄 학술대회
, pp.282
-282
(Apr, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 윤형진, 신치범,
Effect of Process Variables on the Properties of Electrodeposited CoWP Films
, 한국화학공학회 2007년 봄 학술대회
, pp.271
-271
(Apr, 2007)
-
[학술회의]
김창구, 남궁윤미,
Electrodeposition of CoWB Films for Capping Layers in Cu Interconnections
, 한국화학공학회 2007년 봄 학술대회
, pp.269
-269
(Apr, 2007)
-
[학술회의]
김창구, 유재석, 박창한, 김현정,
The Measurement of Thermal Properties for Thin Films Using Photothermal Effect
, 한국화학공학회 2007년 봄 학술대회
, pp.252
-252
(Apr, 2007)
-
[학술회의]
김창구, S.M.S.I.Dulal, 윤형진, 신치범,
Electrodeposition of CoWP Diffusion Barrier Layer on Copper Interconnection Line
, 한국전기화학회 2007년 춘계 학술발표회
, pp.145
-145
(Apr, 2007)
-
[학술회의]
김창구, 이형무, 박창한,
A Comparative Study on Deep Si Etching Using PFC- and UFC-Containing Plasmas
, 한국공업화학회 2006년 가을 학술대회
(Nov, 2006)
-
[학술회의]
김창구, 윤형진, 김태호,
Electroless Plating of Co-Alloy Capping Layers for Copper Interconnection
, 한국공업화학회 2006년 가을 학술대회
(Nov, 2006)
-
[학술회의]
김창구, 이형무, 박창한,
Environment-Friendly Plasma Etching of High Aspect Ratio Deep Si
, 한국화학공학회 2006년 가을 학술대회
(Oct, 2006)
-
[학술회의]
김창구, 윤형진, 김태호,
Electrolyte Development for Electroless Plating of Cladding Layers in Cu Interconnection
, 한국화학공학회 2006년 가을 학술대회
(Oct, 2006)
-
[학술회의]
김창구, 이형무, 박창한, 윤형진, 신치범, 김태호,
Effects of the ion mass and the ion incident angle on etch rates in atomic scale etching
, 한국화학공학회 2006년 봄 학술대회
(Apr, 2006)
-
[학술회의]
김창구, 김일욱, 류현규, 신치범,
Plasma Etching of Silicon Dioxide Contact Hole Using Low Global Warming Potential Gases
, 한국에너지기후변화학회 2005년 추계학술대회
, pp.110
-114
(Dec, 2005)
-
[학술회의]
김창구, 윤형진, 민재호, 김태호, 신치범, 문상흡,
Atomic Scale Etching of Poly-Si in Inductively Coupled Ar and He Plasmas
, 한국화학공학회 2005년도 가을 학술대회
(Oct, 2005)
-
[학술회의]
신치범, 정승면, 김성태, 김창구, 이대훈,
차량용 12-V 납축전지의 동적 거동 모델링
, 한국화학공학회 봄학술대회
(Apr, 2005)
-
[학술회의]
김창구, 정희석, 신치범,
A Comparative Study on Atomic Layer Etching of Chlorinated-Silicon Surfaces in Argon and Helium Plasma
, 2004년도 화학공학회/공업화학회 공동 학술대회
, pp.198
-198
(Oct, 2004)
-
[학술회의]
김창구, 류현규, 김일욱, 신치범, 정희석,
Etching of a 170 nm-diameter SiO2 Contact Hole in C4F6/O2/Ar Plasmas
, 2nd Symposium for Nano-Chemical Processing
, pp.45
(Jun, 2004)
-
[학술회의]
신치범, 이백행, 김병우, 김성민, 김창구, 이대훈,
차량용 42V 전기공급 시스템을 위한 ultracapacitor의 열적 특성을 위한 모델링
, 한국화학공학회 2004년도 봄학술대회
, pp.153
(Apr, 2004)
-
[학술회의]
김창구, 고은용, 정희석, 신치범,
Silicon Surface Smoothing by Argon Cluster Impact
, 한국화학공학회 2003년도 가을학술대회
, pp.203
-203
(Oct, 2003)
-
[학술회의]
김창구,
Interaction of a Plasma with Surface Topography
, 2002 Fall Meeting
, Vol.8
, No.2
, pp.4866
-4869
(Oct, 2002)
-
[학술회의]
김창구,
Energy and Angular Distributions of Ions Extracted from a Hole in Contact with a High Density Plasma
, 제1회 나노화학공정 심포지움 및 제4회 CVD 심포지움
, Vol.1
, No.1
, pp.22
-25
(Jun, 2002)
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