| 논문 및 연구활동 |
- 연구활동(주요논문)
-
[논문]
Fabrication of uniformly arrayed single- and multi-directional slanted Cu nanorods
(ECS SOLID STATE LETTERS)
- 2015.11
김창구, 김준현, 박정근, 조성운
-
[논문]
Direct and environmentally benign synthesis of manganese oxide/graphene composites from graphite for electrochemical capacitors
(JOURNAL OF POWER SOURCES)
- 2015.05
김창구, 강두원, 김상욱, 이혜민, 정경화
-
[논문]
Abrupt change with surfactant concentration in the surface morphology of the electrodeposited manganese oxide films for electrochemical capacitors
(ELECTROCHIMICA ACTA)
- 2015.04
김창구, 권범진, 송찬주, 강흥중, 이혜민, 조성운
-
[논문]
ZrO2-SiO2 nanosheets with ultrasmall WO3 nanoparticles and their enhanced pseudocapacitance and stability
(ACS APPLIED MATERIALS & INTERFACES)
- 2014.11
김상욱, 정경화, 강지구, 이혜민, 이재혁, 김재호, 김창구, 이희웅
-
[논문]
One-pot synthesis of thin Co(OH)2 nanosheets on graphene and their high activity as a capacitor electrode
(RSC ADVANCES)
- 2014.10
김상욱, 이혜민, 정경화, Yuanzhe Piao, 이희웅, 이재혁, 김재호, 김창구
- 국제학술논문지
-
[논문]
Fabrication of uniformly arrayed single- and multi-directional slanted Cu nanorods
(ECS SOLID STATE LETTERS)
- 2015.11
김창구, 김준현, 박정근, 조성운
-
[논문]
Cu-doped TiO2/reduced graphene oxide thin-film photocatalysts: Effect of Cu content upon methylene blue removal in water
(CERAMICS INTERNATIONAL)
- 2015.11
김창구, Thanh-Truc Pham, Chinh Nguyen-Huy, 손태환, Thuy-Duong Nguyen-Phan, 신은우, 이현준
-
[논문]
Reduction in the diameter of contact holes with a high anisotropy and aspect ratio
(ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY)
- 2015.07
김창구, 김상인, 신은우, 조성운, 김준현
-
[논문]
Facile microwave-assisted synthesis and controllable architecture of three-dimensional nickel titanate
(CRYSTENGCOMM)
- 2015.06
김창구, 신은우, Chinh Nguyen Huy, Thuy-Duong Nguyen-Phan
-
[논문]
Direct and environmentally benign synthesis of manganese oxide/graphene composites from graphite for electrochemical capacitors
(JOURNAL OF POWER SOURCES)
- 2015.05
김창구, 강두원, 김상욱, 이혜민, 정경화
-
[논문]
Abrupt change with surfactant concentration in the surface morphology of the electrodeposited manganese oxide films for electrochemical capacitors
(ELECTROCHIMICA ACTA)
- 2015.04
김창구, 권범진, 송찬주, 강흥중, 이혜민, 조성운
-
[논문]
Slot-embedded photonic-crystal resonator with enhanced modal confinement
(OPTICS LETTERS)
- 2015.02
김상인, 김창구, 정창영
-
[논문]
ZrO2-SiO2 nanosheets with ultrasmall WO3 nanoparticles and their enhanced pseudocapacitance and stability
(ACS APPLIED MATERIALS & INTERFACES)
- 2014.11
김상욱, 정경화, 강지구, 이혜민, 이재혁, 김재호, 김창구, 이희웅
-
[논문]
One-pot synthesis of thin Co(OH)2 nanosheets on graphene and their high activity as a capacitor electrode
(RSC ADVANCES)
- 2014.10
김상욱, 이혜민, 정경화, Yuanzhe Piao, 이희웅, 이재혁, 김재호, 김창구
-
[논문]
Single- and Multi-Directional Slanted Plasma Etching of Silicon under Practical Plasma Processing Conditions
(ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY)
- 2014.09
김창구, 이강택, 강두원, 조성운, 김준현
-
[논문]
Electrodeposition of manganese-nickel oxide films on a graphite sheet for electrochemical capacitor applications
(MATERIALS)
- 2014.01
김창구, 이강택, 이혜민
-
[논문]
Hydrothermal synthesis of one-dimensional tungsten oxide nanostructures using cobalt ammonium sulfate as a structure-directing agent
(KOREAN JOURNAL OF CHEMICAL ENGINEERING)
- 2013.10
김창구, 이강택, 이혜민, Rajagopal
-
[논문]
Real-Time Endpoint Detection of Small Exposed Area SiO2 Films in Plasma Etching Using Plasma Impedance Monitoring with
Modified Principal Component Analysis
(PLASMA PROCESSES AND POLYMERS)
- 2013.10
김창구, 채희엽, 남재욱, 장해규
-
[논문]
Controlled synthesis of MoO3 microcrystals by subsequent calcination of hydrothermally grown pyrazine-MoO3 nanorod hybrids and their photodecomposition properties
(MATERIALS CHEMISTRY AND PHYSICS)
- 2013.08
Rajagopal, Robichaud, Khyzhun, Djaoued, 김창구, Nataraj
-
[논문]
High luminescence efficiency white light emitting diodes based on surface functionalized quantum dots dispersed in polymer matrices
(COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS)
- 2013.04
이강택, 윤철상, 홍현국, 황대현, 이도창, 김영주, 김창구, 김현창
-
[논문]
Electroless deposition of NiMoP films using alkali-free chemicals for capping layers of copper interconnections
(KOREAN JOURNAL OF CHEMICAL ENGINEERING)
- 2012.09
김창구, 채희엽, 이혜민
-
[논문]
Angular dependences of SiO2 etch rates in C4F6/O2/Ar and C4F6/CH2F2/O2/Ar plasmas
(JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A)
- 2012.07
김창구, 채희엽, 문상흡, 조성운, 이진관
-
[논문]
Preparation and characterization of the electrodeposited Ni-Co oxide thin films for electrochemical capacitors
(KOREAN JOURNAL OF CHEMICAL ENGINEERING)
- 2011.06
김창구, 이강택, S.G.Kandalkar, 이혜민, 서승혜
-
[논문]
Cobalt-nickel composite films synthesized by chemical bath deposition method as an electrode material for supercapacitors
(JOURNAL OF MATERIALS SCIENCE)
- 2011.05
김창구, 이강택, 서승혜, Kandalkar, 이혜민
-
[논문]
Structural, morphological, and electrical characteristics of the electrodeposited cobalt oxide electrode for supercapacitor applications
(MATERIALS RESEARCH BULLETIN)
- 2011.01
김창구, Kandalkar, 채희엽, 이혜민
-
[논문]
Characteristics of electrodeposited CoWP capping layers using alkali-metal-free precursors
(KOREAN JOURNAL OF CHEMICAL ENGINEERING)
- 2010.09
김창구, 이강택, 손영선, 남궁윤미, 이혜민
-
[논문]
Comparison of amine-functionalized mesoporous silica particles for ibuprofen delivery
(KOREAN JOURNAL OF CHEMICAL ENGINEERING)
- 2010.07
이강택, 이기태, 이호섭, Wu Zhijian, 김창구, 이덕규
-
[논문]
Chemical synthesis of cobalt oxide thin film electrode for supercapacitor application
(SYNTHETIC METALS)
- 2010.06
C.D.Lokhande, D.S.Dhawale, 김창구, Kandalkar
-
[논문]
Fluorescence Quenching Caused by Aggregation of Water- Soluble CdSe Quantum Dots
(COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS)
- 2010.04
이강택, 노민호, 이호섭, 주상우, 김창구, 김태훈
-
[논문]
Mechanism of sidewall necking and bowing in the plasma etching of high aspect-ratio contanct holes
(JOURNAL OF THE ELECTROCHEMICAL SOCIETY)
- 2010.01
문상흡, 이승행, 장일용, 김창구, 이진관
-
[논문]
Formation and characterization of thin silicon dioxide films obtained by inductively-coupled high-density plasmas using a dual rotated spiral antenna system
(ECS Transcations)
- 2009.10
김창구, 우상호, 김해원, 엄평용, 지정민, 김일욱
-
[논문]
Effect of titanium ion concentration on electrodeposition of nanostructured TiNi films
(Journal of Materials Science)
- 2009.07
김창구, Mahapatra, Anthony, 이상민, 이혜민
-
[논문]
Oblique-directional plasma etching of Si using a Faraday cage
(Journal of the Electrochemical Society)
- 2009.07
문상흡, 장일용, 이승행, 이진관, 김창구, 민재호
-
[논문]
Cyclic deposition/etching process to etch a bowing-free SiO2 contact hole
(Journal of the Electrochemical Society)
- 2009.05
문상흡, 장일용, 이진관, 김창구, 이승행
-
[논문]
Film Properties of Nitrogen-Doped Polycrystalline Silicon for Advanced Gate Material
(Korean Journal of Chemical Engineering)
- 2009.05
김창구, 엄평용, 김일욱, 우상호, 이혜민
-
[논문]
Electrodeposition of CoWP film V. Structural and morphological characterisations
(Applied Surface Science)
- 2009.03
김창구, 윤형진, Dulal, 신치범
-
[논문]
Argon and nitrogen plasma surface treatments of polyimide films for electroless copper plating
(Journal of the Korean Physical Society)
- 2009.02
채희엽, 황진하, 정동근, 김창구, 김치정
-
[논문]
Dependence of Etch Rates of Silicon Substrates on the Use of C4F8 and C4F6 Plasmas in the Deposition Step of the Bosch Process
(Journal of Vacuum Science and Technology B)
- 2009.01
김창구, 김일욱, 이형무, 이혜민, 채희엽, 남궁윤미
-
[논문]
Development of an alkali-metal-free bath for electroless deposition of Co-W-P capping layers for copper interconnections
(Journal of Alloys and Compounds)
- 2009.01
김창구, 이형무, 성준용, Dulal, 김태호
-
[논문]
Characterisation of electrodeposited Co-W-P amorphous coatings on carbon steel
(Electrochimica Acta)
- 2008.12
김창구, 윤형진, Dulal, 신치범
-
[논문]
Electrodeposition of CoWP Film IV. Effect of Applied Potential and Current Density
(Journal of Alloys and Compounds)
- 2008.08
김창구, 김태호, Dulal, 신치범
-
[논문]
Optimisation of Process Parameters for Electroless Plating of Co-W-P Capping Layers from an Alkali-Metal-Free Bath
(Surface and Coatings Technology)
- 2008.06
김창구, 채희엽, Dulal, 김태호, 박창한
-
[논문]
Particle size-dependent giant nonlinear absorption in nanostructured Ni-Ti alloys
(Optics Express)
- 2008.06
이상민, 김창구, 임한조, s. kumar mahapatra, 이혜민, 이황운, john kiran anthony, 김기홍, 김희철
-
[논문]
Comparison of Deep Silicon Etching Using SF6/C4F8 and SF6/C4F6 Plasmas in the Bosch Process
(Journal of Vacuum Science and Technology B)
- 2008.03
김창구, 김일욱, 권혁규, 이형무, 김현정, 유재석
-
[논문]
Electrodeposition of CoWP Film II. Effect of Electrolyte Concentration
(Journal of Applied Electrochemistry)
- 2008.01
김창구, S.M.S.I. Dulal, 윤형진, 신치범
-
[논문]
Electrodeposition of CoWP Film III. Effect of pH and Temperature
(Electrochimica Acta)
- 2007.12
김창구, S.M.S.I.Dulal, 윤형진, 신치범
-
[논문]
Electrodeposition of CoWP Film
(Journal of the Electrochemical Society)
- 2007.10
김창구, S.M.S.I.DULAL, 윤형진, 신치범
-
[논문]
Structural and Morphological Properties of Nitrogen-Doped Polysilicon for Advanced Gate Material
(ECS Transactions)
- 2007.10
김창구, 김일욱, 최형수, 엄평용, 이동근, 조성길, 우상호, 김해원
-
[논문]
Simultaneous Oxygen Plasma and Thermal Treatments of an ITO Surface to Improve the Electrical Characteristics of Organic Light-Emitting Diodes
(Journal of the Korean Physical Society)
- 2007.09
채희엽, 장성기, 정동근, 김창구, 김형섭
-
[논문]
Comparison of Atomic Scale Etching of poly-Si in Inductively Coupled Ar and He Plasmas
(Korean Journal of Chemical Engineering)
- 2007.07
김창구, 민재호, 김태호, 윤형진, 신치범, 문상흡
-
[논문]
A Comparative Study on a High Aspect Ratio Contact Hole Etching in UFC- and PFC-Containing Plasmas
(Microelectronics Journal)
- 2007.01
김창구, 류현규, 김일욱, 신치범, 이강택
-
[논문]
Interactive relationships between sidewall and bottom etch rates, as-affected by sidewall angle, during SiO2 etching in a CHF3 plasma
(Journal of Vacuum Science & Technology B)
- 2006.07
문상흡, 민재호, 이진관, 김창구
-
[논문]
Effects of Wafer Cleaning on the Interconncet Structure and Its Electrical Properties during the Al Dual Damascene Process for the Fabrication of Sub-100nm Memory Devices
(Journal of Chemical Engineering of Japan)
- 2005.11
김창구, 김일욱, 류현규, 신치범
-
[논문]
Ion Dynamics in Plasma Processing for the Fabrication of Ultrafine Structures
(Korean Journal of Chemical Engineering)
- 2005.09
김창구
-
[논문]
Deep Etching of Silicon with Smooth Sidewalls by an Improved Gas-Chopping Process Using a Faraday Cage and a High Bias Voltage
(Journal of Vacuum Science and Technology B)
- 2005.07
문상흡, 민재호, 이진관, 김창구
-
[논문]
Improvement of SiO2 Pattern Profiles Etched in CF4 and SF6 Plasmas by Using a Faraday Cage and Neutral Beams
(Surface and Coatings Technology)
- 2005.04
문상흡, 이진관, 이겨레, 김창구, 민재호
-
[논문]
Plasma Molding over Surface Topography: Measurement of Energy and Angular Distributions of Ions Extracted through a Large Hole
(Thin Solid Films)
- 2005.03
김창구, 신치범
-
[논문]
Effect of Sidewall Properties on the Bottom Microtrench during SiO2 Etching in a CF4 Plasma
(Journal of Vacuum Science and Technology B)
- 2005.03
문상흡, 이진관, 이겨레, 김창구, 민재호
-
[논문]
Design of Doped Hybrid Xerogels for a Controlled Release of Brilliant Blue FCF
(Journal of Non-Crystalline Solids)
- 2004.08
이강택, 주현우, 안익성, Zhijian Wu, 김창구, 김중현
-
[논문]
Analysis of Langmuir Probe Data in High Density Plasmas
(Korean Journal of Chemical Engineeirng)
- 2004.05
김창구
-
[논문]
Dependences of bottom and sidewall etch rates on bias voltage and source power during the etching of poly-Si and fluorocarbon polymer using SF6, C4F8, and O2 plasmas
(Journal of Vacuum Science and Technology B)
- 2004.05
문상흡, 이진관, 이겨레, 김창구, 민재호
-
[논문]
Angular dependence of etch rates in the etching of poly-Si and fluorocarbon polymer using SF6, C4F8, and O2 plasmas
(Journal of Vacuum Science and Technology A)
- 2004.05
문상흡, 이진관, 이겨레, 김창구, 민재호
-
[논문]
Effect of CH2F2 Addition on a High Aspect Ratio Contact Hole Etching in a C4F6/O2/Ar Plasma
(Electrochemical and Solid-State Letters)
- 2003.09
김창구, 이병석, 박성기, 김일욱, 류현규
-
[논문]
Trajectories of Ions inside a Faraday Cage Located in a High Density Plasma Etcher
(Korean Journal of Chemical Engineering)
- 2003.02
문상흡, 황성욱, 조병옥, 김창구, 류정현
-
[논문]
Plasma molding over surface topography: Energy and angular distribution of ions extracted out of large holes
(Journal of Applied Physics)
- 2002.03
김창구, Demetre J.Economou
- 국내학술논문지
-
[논문]
Bosch 공정에서 Si 식각속도와 식각프로파일에 대한 Ar 첨가의 영향
(KOREAN CHEMICAL ENGINEERING RESEARCH(화학공학))
- 2013.12
김창구, 지정민, 조성운
-
[논문]
Electroless Plating of Co-Alloy Thin Films Using Alkali-Free Chemicals
(The Korean Journal of Chemical Engineering Research)
- 2007.12
김창구, 윤형진, 김태호
- 국제학술발표
-
[학술회의]
Fabrication of slanted silicon profiles using plasma etching
(International Conference on Engineering, Technology, and Applied Science (ICETA) 2015)
- 2015.04
김창구, 조성운, 김준현
-
[학술회의]
Effect of fluorocarbon discharge gas on the angular dependence of SiO2 etch rates
(7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials)
- 2015.03
김창구, 조성운, 김준현, 박정근, 옥승수
-
[학술회의]
Multi-directional slanted plasma etching of silicon
(7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials)
- 2015.03
김창구, 조성운, 김준현
-
[학술회의]
Dopantless tin oxide films prepared by LPCVD
(Materials Challenges in Alternative & Renewable Energy (MCARE 2015))
- 2015.02
김창구, 백창용, 강두원, 이경미, 김준현, 조성운
-
[학술회의]
Effect of deposition temperature on electrical properties of dopantless tin oxide films
(Materials Challenges in Alternative & Renewable Energy (MCARE 2015))
- 2015.02
김창구, 백창용, 강두원, 이경미, 김준현, 조성운
-
[학술회의]
Electrical properties and surface morphologies of SnO2 films prepared by LPCVD
(11th International Conference on Nano-Molecular Electronics)
- 2014.12
김창구, 백창용, 강두원, 이경미, 김준현, 조성운
-
[학술회의]
Oblique plasma etching: Fabrication of single-and multi-directional etch profiles
(11th International Conference on Nano-Molecular Electronics)
- 2014.12
김창구, 조성운
-
[학술회의]
Pseudocapacitive performance of porous ZrO2-SiO2 sheets doped with WO3 nanoparticles
(Chiba University-Ajou University Symposium 2014)
- 2014.12
김창구, 정경화, 김상욱, 이혜민
-
[학술회의]
Multi-directional slanted plasma etching
(Chiba University-Ajou University Symposium 2014)
- 2014.12
김창구
-
[학술회의]
Low pressure chemical vapor deposition of dopantless tin oxide films
(11th Korea-Japan Symposium on Materials & Interface)
- 2014.11
김창구, 백창용, 강두원, 이경미, 조성운, 김준현
-
[학술회의]
Low pressure chemical vapor deposition of SnO2 films: Temperature dependence of electrical properties
(11th Korea-Japan Symposium on Materials & Interface)
- 2014.11
김창구, 백창용, 강두원, 이경미, 조성운, 김준현
-
[학술회의]
A facile synthesis and electrochemical analysis of cobalt hydroxide/graphene nanocomposites
(65th Annual Meeting of the International Society of Electrochemistry)
- 2014.09
김창구, 정경화, 김상욱, 이혜민
-
[학술회의]
Effects of TTAB concentration on the electrodeposited manganese oxide for electrochemical capacitors
(65th Annual Meeting of the International Society of Electrochemistry)
- 2014.09
김창구, 이혜민
-
[학술회의]
Electrodeposition and electrochemical analysis of ternary metal oxides for supercapacitors
(65th Annual Meeting of the International Society of Electrochemistry)
- 2014.09
김창구, 이혜민, 남궁윤미
-
[학술회의]
Addition of TTAB as a surfactant for the electrodeposition of cobalt oxide films
(65th Annual Meeting of the International Society of Electrochemistry)
- 2014.09
김창구, 이혜민, 남궁윤미
-
[학술회의]
Slanted plasma etching: Fabrication of three-dimensional nanostructures
(6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials )
- 2014.03
김창구, 조성운
-
[학술회의]
Dopantless control over the electrical properties of tin oxide films by LPCVD
(2014 Kyoto-Ajou Joint Symposium on Energy Science)
- 2014.02
김창구, 조성운, 김준현
-
[학술회의]
Supercapacitive properties of metal oxide-graphene nanocompoites
(2013 Materials Research Society Fall Meeting)
- 2013.12
김창구, 정경화, 김상욱, 이혜민
-
[학술회의]
One-step synthesis of Co(OH)2/graphene nanocomposites from graphite for electrochemical supercapacitors
(224th Electrochemical Society Meeting)
- 2013.10
김창구, 정경화, 김상욱, 이혜민
-
[학술회의]
Fabrication of metal oxide/graphene nanocomposites for electrochemical capacitors
(224th Electrochemical Society Meeting)
- 2013.10
김창구, 정경화, 김상욱, 이혜민
-
[학술회의]
Effect of the substrate temperature on the electrical conductivity of tin oxide films by LPCVD
(TACT 2013 International Thin Films Conference)
- 2013.10
김창구, 조성운, 김준현
-
[학술회의]
Characteristics of electrical conductivity of undopped tin oxide films prepared by low pressure chemical vapor deposition
(TACT 2013 International Thin Films Conference)
- 2013.10
김창구, 조성운, 김준현
-
[학술회의]
Angular dependence of etch rates and etch selectivity of Si3N4 in C4F6/Ar/O2/CH2F2 plasmas
(Dry Process Symposium 2013)
- 2013.08
김창구, 김준현, 조성운
-
[학술회의]
Kinetic analysis of tin oxide films prepared by low pressure chemical vapor deposition
(9th World Congress of Chemical Engineering)
- 2013.08
김창구, 김준현
-
[학술회의]
Mechanism of SiO2 etching in C4F6/Ar/O2/CH2F2 plasmas
(9th World Congress of Chemical Engineering)
- 2013.08
김창구, 조성운
-
[학술회의]
Electrodeposition of single and binary manganese oxides for electrochemical capacitors
(9th World Congress of Chemical Engineering)
- 2013.08
김창구, 이혜민
-
[학술회의]
Fabrication of three-dimensional nanostructures using a high-density plasma
(9th World Congress of Chemical Engineering)
- 2013.08
김창구, 조성운, 김준현, 이혜민
-
[학술회의]
Angular dependence of SiO2 etch rates in C4F6/CH2F2/O2/Ar plasmas
(5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2013))
- 2013.01
김창구, 김준현, 조성운
-
[학술회의]
Electrodeposition and electrochemical analysis binary metal oxides for supercapacitors
(Materials Research Society 2012 Fall Meeting)
- 2012.11
이혜민, 김창구
-
[학술회의]
Plasma etching for the fabrication of nanoscale patterns: A new cyclic process for high aspect-ratio SiO2 contact holes
(UKC 2012)
- 2012.08
김창구, 문상흡, 이진관
-
[학술회의]
Development of environmentally benign deep silicon etching using C4F6 plasmas in the deposition step of the Bosch process
(UKC 2012)
- 2012.08
김창구, 이형무
-
[학술회의]
Electrodeposition of Ni-Mn oxides thin films on a carbon sheet for Electrochemical supercapacitors
(220th Electrochemical Society Meeting)
- 2011.10
김창구, 이혜민
-
[학술회의]
Effect of pH and temperature on the electrodeposition of Co-Mn oxide thin films
(220th Electrochemical Society Meeting)
- 2011.10
김창구, 이혜민, 홍다혜
-
[학술회의]
Electrodeposition of cobalt-manganese oxide thin films for supercapacitor electrodes
(14th Asian Chemical Congress 2011)
- 2011.09
김창구, 이혜민, 서승혜
-
[학술회의]
Preparation of characterization of electrodeposited manganese-nickel oxide films for electrochemical supercapacitors
(14th Asian Chemical Congress 2011)
- 2011.09
김창구, 이혜민
-
[학술회의]
Optical and Electrical Properties of Pure and Aluminium - Doped Zinc Oxide Thin Film Nanostructures Synthesized by Electrodeposition Technique
(International Conference on Nanoscience and Nanotechnology (ICNN 2011))
- 2011.07
Rajagopal, Ganesan, Muthukumar, 김창구
-
[학술회의]
Angular dependence of Si3N4 etch rates and SiO2-to-Si3N4 etch selectivity in C4F6/Ar/O2/CH2F2 plasmas
(38th IEEE International Conference on Plasma Science)
- 2011.06
김창구, 조성운
-
[학술회의]
Control of the contact hole diameter using inductively coupled fluorocarbon and hydrocarbon plasmas
(38th IEEE International Conference on Plasma Science)
- 2011.06
김창구, 조성운, 김준현
-
[학술회의]
Electrodeposition of Cobalt Oxide Electrode for Supercapacitor Applications
(The 61st Annual Meeting of the International Society of Electrochemistry)
- 2010.09
김창구, 서승혜, Kandalkar, 이혜민
-
[학술회의]
Characterization of Electrolessly Plated NiMoP Thin Films Using Alkali-Metal-Free Chemicals
(The 61st Annual Meeting of the International Society of Electrochemistry)
- 2010.09
김창구, 서승혜, 이혜민
-
[학술회의]
Effect of pH and Temperature of the Electrolyte on the Electrodeposition of CoWP Films Using Alkali-Metal-Free Precursors
(217th Electrochemical Society Meeting)
- 2010.04
김창구, 이혜민, 손영선
-
[학술회의]
Effect of CH2F2 addition on the angular dependence of Si3N4 etch rates and SiO2-to-Si3N4 etch selectivity in a C4F6/Ar/O2 plasma
(2nd international symposium on advanced plasma science and its applications for nitrides and nanomaterials (ISPlasma 2010))
- 2010.03
김창구, 이진관, 문상흡, 조성운
-
[학술회의]
Improvement of RIE lag in high aspect ratio Si etching
(2nd international symposium on advanced plasma science and its applications for nitrides and nanomaterials)
- 2010.03
김창구, 신우식, 지정민
-
[학술회의]
Structural and morphological characteristics of the electrodeposited CoWP thin films
(216th Electrochemical Society)
- 2009.10
김창구, 지정민, Dulal, 신우식
-
[학술회의]
Use of alkali-metal-free chemicals in the electrodeposition of CoWP capping layers for Cu interconnection
(216th Electrochemical Society)
- 2009.10
김창구, 이혜민, 손영선
-
[학술회의]
Formation and characterization of nanostructured TiNi films fabricated using an electrochemical method
(216th Electrochemical Society)
- 2009.10
김창구, 이혜민, 손영선
-
[학술회의]
Fabrication and characterization of NiMoP thin films fabricated using an electrochemical method
(216th Electrochemical Society)
- 2009.10
김창구, 조성운, Dulal, 신우식
-
[학술회의]
Formation and characterization of thin silicon dioxide films obtained by inductively coupled high-density plasmas using a dual rotated spiral antenna system
(216th Electrochemical Society)
- 2009.10
김창구, 우상호, 김해원, 엄평용, 지정민, 김일욱
-
[학술회의]
Characteristics of Etch Profiles Processed with the Bosch Process Using SF6/C4F8 and SF6/C4F6 Plasmas
(ICMAP 2008)
- 2008.08
김창구, 남궁윤미, 이혜민, 권혁규
-
[학술회의]
A Novel Etching Process to Obtain a Bowing-Free SiO2 Contact Hole
(ICMAP 2008)
- 2008.08
문상흡, 이진관, 김창구
-
[학술회의]
Effect of Electrolyte Concentration on Electrodeposition of NiMoP Thin Films as Capping Layers
(213th Electrochemical Society Meeting)
- 2008.05
김창구, Dulal, 이혜민, 신치범, 남궁윤미
-
[학술회의]
Improvement of Corrosion Protective Properties Using Electrodeposited CoWP Coating
(213th Electrochemical Society Meeting)
- 2008.05
김창구, 윤형진, Dulal, 신치범, 박병훈
-
[학술회의]
Investigation of the Magnetic Properties of Electrodeposited CoWP Films
(213th Electrochemical Society Meeting)
- 2008.05
김창구, Mahapatra, 김일욱, 남궁윤미
-
[학술회의]
Control of the Electrical and Optical Properties of Plasma Polymerized Fluorocarbon Films
(213th Electrochemical Society Meeting)
- 2008.05
김창구, Mahapatra, 우상호, 권혁규, 박병훈
-
[학술회의]
Electroless Deposition of CoWP Capping Layers Using Alkali-Metal-Free Chemicals
(213th Electrochemical Society Meeting)
- 2008.05
김창구, 이혜민, Dulal, 권혁규
-
[학술회의]
Structural and Morphological Properties of Nitrogen Doped Polysilicon for Advanced Gate Material
(212th Meeting of the Electrochemical society)
- 2007.10
김창구, 김일욱, 최형수, 엄평용, 이동근, 조성길, 우상호, 김해원
-
[학술회의]
Electrodeposition of CoWP Thin Films on Copper Stacked on Silicon Wafer
(212th Meeting of the Electrochemical society)
- 2007.10
김창구, 윤형진, 김태호, 박창한, 신치범, S.M.S.I.Dulal
-
[학술회의]
Effect of Deposition Modes on Composition and Microstructure of Electrodeposited CoWP Film
(212th Meeting of the Electrochemical society)
- 2007.10
김창구, 전원진, 윤형진, S.M.S.I.Dulal, 남궁윤미
-
[학술회의]
Angular Dependence of Si3N4 Etch Rates and SiO2-TO-Si3N4 Etch Selectivity in a C4F8/Ar Plasma
(6th Asian-European International Conference on Plasma Surface Engineering)
- 2007.09
문상흡, 장일용, 이진관, 김창구, 이승행
-
[학술회의]
Gas-Chopping Etching of Silicon Using SF6/C4F8 and SF6/C4F6 Plasmas
(6th Asian-European International Conference on Plasma Surface Engineering)
- 2007.09
김창구, 우상호, 김일욱, 권혁규, 이형무
-
[학술회의]
Environment-Friendly Plasma Etching of High Aspect Ratio Silicon by a Gas-Chopping Process
(2007 MRS Spring Meeting)
- 2007.04
김창구, 이형무, 박창한
-
[학술회의]
Electrical and Chemical Characteristics of CoWP Capping Layers Deposited on Cu by Electroless Plating
(2007 MRS Spring Meeting)
- 2007.04
김창구, 윤형진, 김태호
-
[학술회의]
Development of a Bath and Optimization of Electrochemical Parameters for the Deposition of Platinum Nanoparticles on Graphite
(2007 MRS Spring Meeting)
- 2007.04
김창구, 윤형진, 김태호, 신치범, S.M.S.I.Dulal
-
[학술회의]
Controlling Size, Shape, and Distribution of Platinum Nanoparticles Electrodeposited on Carbon Supports
(2007 MRS Spring Meeting)
- 2007.04
김창구, S.M.S.I.Dulal, 전원진, 신치범
-
[학술회의]
Measurement of Thermal Properties of Thin Films Using the Photothermal Deflection and Photothermal Displacement Methods
(2007 MRS Spring Meeting)
- 2007.04
김창구, 박창한, 이형무, 유재석
-
[학술회의]
Etching of Poly-Si with Atomic Scale Accuracy in Inductively Coupled Ar and He Plasmas
(8th International Conference on Solid-State and Integrated-Circuit Technology)
- 2006.10
김창구, 신치범, 이형무, 박창한, 윤형진, 김상인, 김태호
-
[학술회의]
Angular Dependence of the SiO2-to-Si3N4 Etch Selectivity in C4F6/O2/Ar/CH2F2 Plasmas
(International Union for Vacuum Science, Technique, and Applications (IUVSTA) Executive Council Meeti)
- 2006.09
문상흡, 장일용, 이진관, 김창구, 이승행
-
[학술회의]
Etch Characteristics and Mechanisms in Atomic Scale Etching of Poly-Silicon
(209th Meeting of the Electrochemical Society)
- 2006.05
김창구, 김태호, 김일욱, 윤형진, 이형무, 신치범, 박창한
-
[학술회의]
Modeling of the Charge-Discharge Behavior of a 12-V Automotive Lead-Acid Battery
(209th Meeting of the Electrochemical Society)
- 2006.05
신치범, 윤형진, 전상훈, 김창구, 류홍석
-
[학술회의]
Dependences of the Ion Mass and the Ion Incident Angle on Etch Rates in Atomic Scale Etching of Poly-Si
(14th Gaseous Electronics Meeting)
- 2006.02
김창구, 김일욱, 박창한, 윤형진, 신치범, 김태호
-
[학술회의]
Atomic Scale Etching of Poly-Si in Inductively Coupled Ar and He Plasmas
(AVS 52nd International Symposium)
- 2005.10
김창구, 김일욱, 민재호, 신치범, 문상흡
-
[학술회의]
Aluminum Dual Damascene Process for the Fabrication of Sub-100nm Memory Devices
(207th Meeting of the Electrochemical Society)
- 2005.05
김창구, 김일욱, 류현규, 신치범
-
[학술회의]
Modeling of the Dynamics Behavior of a 12-V Automotive Lead-Acid Battery
(207th Meeting of the Electrochemical Society)
- 2005.05
신치범, 정승면, 김성태, 김창구, 이대훈
-
[학술회의]
High Aspect Ratio Contact Hole Etching in C4/F6/O2/Ar/CH2F2 and c-C4/F8/O2/Ar/CH2F2 Plasmas
(American Vacuum Society 51st International Symposium)
- 2004.11
김창구, 김일욱, 류현규, 신치범
-
[학술회의]
Aluminum dual damascene metallization for sub-100 nm memory devices
(6th Japan-Korea Symposium on Materials and Interfaces)
- 2004.10
김창구, 김일욱, 류현규, 신치범
-
[학술회의]
The Use of C4F6 Plasmas as an Alternative to Perfluorocarbons for High Aspect Ratio Contact Hole Etching
(206th Meeting of the Electrochemical Society)
- 2004.10
김창구, 김일욱, 유현구, 신치범
-
[학술회의]
Modeling of a Capacitive Deionization Process
(205th Meeting of the Electrochemical Society)
- 2004.05
신치범, 조원일, 서동진, 조병원, 김창구, 전상훈
-
[학술회의]
Improvement of Anisotropy and Aspect Ratio of a Pattern Etched in Bosch Process by Using a Faraday Cage
(American Vacuum Society 50th International Symposium)
- 2003.11
문상흡, 이진관, 이겨레, 김창구, 민재호
-
[학술회의]
A Study on the Pollutant Fate Based on Multimedia Urban Model
(Annual Meeting of American Institute of Chemical Engineers)
- 2003.11
신치범, 최경희, 신현철, 김홍건, 김창구, 이종협
-
[학술회의]
Improvement of SiO2 Pattern Profile Etched in Ar and CF4 Plasmas by Using a Faraday Cage and Neutralized Ions
(4th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2003))
- 2003.10
문상흡, 이진관, 이겨레, 김창구, 민재호
-
[학술회의]
Plasma Molding over Surface Topography: Measurement of Energy and Angular Distributions of Ions Extracted through a Large Hole
(4th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2003))
- 2003.10
김창구, Demetre J.Economou, 신치범
- 국내학술발표
-
[학술회의]
Effect of gas composition on the angular dependence of SiO2 etch rates in fluorocarbon plasmas
(한국화학공학회 2015년도 봄 학술대회)
- 2015.04
김창구, 김준현, 조성운, 박정근
-
[학술회의]
A cyclic process to control the diameter of SiO2 contact holes
(한국화학공학회 2015년도 봄 학술대회)
- 2015.04
김창구, 김준현, 조성운
-
[학술회의]
Surface treatment to control the electrical resistivity of metal
(한국화학공학회 2015년도 봄 학술대회)
- 2015.04
김창구, 김준현, 백창용, 강두원, 이경미, 박정근, 조성운
-
[학술회의]
Effect of bias voltage on the angular dependence of SiO2 etch rates in C4F8 plasmas
(한국화학공학회 2015년도 봄 학술대회)
- 2015.04
김창구, 조성운, 김준현
-
[학술회의]
Etch mechanism of Si3N4 in a C4F6/Ar/O2/CH2F2 plasma
(한국화학공학회 2015년도 봄 학술대회)
- 2015.04
김창구, 김준현, 조성운
-
[학술회의]
Angular dependence of Si3N4 etch rates in fluorocarbon plasmas
(한국화학공학회 2015년도 봄 학술대회)
- 2015.04
김창구, 조성운, 김준현
-
[학술회의]
Angular dependence of SiO2 etch rate in fluorocarbon plasmas
(한국화학공학회 2014년 가을 학술대회)
- 2014.10
김창구, 조성운, 김준현
-
[학술회의]
LPCVD of tin oxide films: Effect of the substrate temperature on the electrical properties
(한국화학공학회 2014년 가을 학술대회)
- 2014.10
김창구, 백창용, 강두원, 이경미, 김준현, 조성운
-
[학술회의]
Directional slanted plasma etching of silicon under practical plasma processing conditions
(한국화학공학회 2014년 가을 학술대회)
- 2014.10
김창구, 김준현, 조성운
-
[학술회의]
Control of the contact hole diameter in C4F6/Ar/O2/CH2F2 plasmas
(한국화학공학회 2014년 가을 학술대회)
- 2014.10
김창구, 조성운
-
[학술회의]
A novel process for the fabrication of three-dimensional Si nanostructures
(한국화학공학회 2014년 봄 학술대회)
- 2014.04
김창구, 조성운
-
[학술회의]
Dependence of the electrical properties of tin oxide films on the substrate temperature
(한국화학공학회 2014년 봄 학술대회)
- 2014.04
김창구, 김준현
-
[학술회의]
Experimental and computational analysis on the deposition of tin oxide films by LPCVD
(한국화학공학회 2014년 봄 학술대회)
- 2014.04
김창구, 김준현
-
[학술회의]
Electrochemical analysis of manganese oxide supercapacitors in 1,3-alkylimidazolum-based ionic liquids
(한국화학공학회 2014년 봄 학술대회)
- 2014.04
김창구, 남궁윤미, 이혜민
-
[학술회의]
Effect of F/C ratio in discharge gases on the angular dependence of etch rates of SiO2
(한국화학공학회 2014년 봄 학술대회)
- 2014.04
김창구, 조성운
-
[학술회의]
Mechanism of SiO2 etching in fluorocarbon plasmas
(한국에너지공학회 2014년도 춘계학술발표회)
- 2014.04
김창구, 조성운
-
[학술회의]
Reaction kinetics of tin oxide films prepared by LPCVD
(한국에너지공학회 2014년도 춘계학술발표회)
- 2014.04
김창구, 김준현
-
[학술회의]
Slanted plasma etching for the fabrication of copper nanorods
(한국화학공학회 2013년도 봄 총회 및 학술대회)
- 2013.04
김창구, 조성운
-
[학술회의]
Low pressure chemical vapor deposition of tin oxide films and their morphological and electrical properties
(한국화학공학회 2013년도 봄 총회 및 학술대회)
- 2013.04
김창구, 김준현, 이진주
-
[학술회의]
Kinetics and mechanisms for the deposition of tin oxide films by low pressure chemical vapor deposition
(한국화학공학회 2013년도 봄 총회 및 학술대회)
- 2013.04
김창구, 김준현
-
[학술회의]
Characterization of binary metal oxides electrodeposited on carbon sheets for supercapacitors
(한국전기화학회 2013년도 춘계총회 및 학술발표회)
- 2013.04
김창구, 이혜민
-
[학술회의]
Electrodeposition of binary metal oxides for supercapacitors
(한국전기화학회 2012년 추계 학술발표회)
- 2012.11
김창구, 이혜민
-
[학술회의]
Reaction mechanism of tin oxide films deposited by low pressure chemical vapor deposition
(한국화학공학회 2012년 가을 학술대회)
- 2012.10
김창구, 강두원, 백창용, 김준현, 조성운
-
[학술회의]
Effect of the O2 flow rate on tin oxide films prepared by low pressure chemical vapor deposition
(한국화학공학회 2012년 가을 학술대회)
- 2012.10
김창구, 김준현, 조성운, 이진주
-
[학술회의]
Control of the roughness on the sidewall of Si trenches during the Bosch process
(한국화학공학회 2012년 봄 학술대회)
- 2012.04
김창구, 조성운, 김준현
-
[학술회의]
Fabrication of three dimensional Cu nanostructures
(한국화학공학회 2012년 봄 학술대회)
- 2012.04
김창구, 조성운
-
[학술회의]
Reduction of contact hole diameter by alternating etching and deposition using a fluorocarbon plasma
(한국화학공학회 2011년 가을 학술대회)
- 2011.10
김창구, 김준현, 조성운
-
[학술회의]
Pseudocapacitive properties of electrodeposited Co/Mn composite oxides for electrochemical capacitors
(한국화학공학회 2011년 가을 학술대회)
- 2011.10
김창구, 이혜민, 서승혜
-
[학술회의]
Effect of process variables on the electrodeposition of manganese-nickel oxide films for supercapacitors
(한국전기화학회 2011년 추계 학술발표대회)
- 2011.10
김창구, 이혜민
-
[학술회의]
The role of steady-state fluorocarbon film during SiO2 etching in C4F6/Ar/O2/CH2F2 plasmas
(한국화학공학회 2011년도 봄 학술대회)
- 2011.04
김창구, 조성운
-
[학술회의]
Control of the contact hole diameter using inductively coupled fluorocarbon and hydrocarbon plasmas
(한국화학공학회 2011년도 봄 학술대회)
- 2011.04
김창구, 김준현, 조성운
-
[학술회의]
Preparation and characterization of electrodeposited Co-Mn composite oxide thin films for Pseudocapacitor application
(한국화학공학회 2011년도 봄 학술대회)
- 2011.04
김창구, 이혜민, 서승혜
-
[학술회의]
Characterization of Mn-Ni oxides thin films electrodeposited on carbon sheet
(한국화학공학회 2011년도 봄 학술대회)
- 2011.04
김창구, 서승혜, 이혜민
-
[학술회의]
Corrosion behavior of CoWP films electrodeposited using alkali-free chemicals
(한국화학공학회 2010년도 가을 학술대회)
- 2010.10
김창구, 이혜민, 서승혜, 손영선
-
[학술회의]
Effect of CH2F2 addition on angular dependence of SiO2 etching in a C4F6/O2/Ar plasma
(한국화학공학회 2010년도 가을 학술대회)
- 2010.10
김창구, 조성운
-
[학술회의]
Control of RIE lag in Si etching
(한국화학공학회 2010년도 가을 학술대회)
- 2010.10
김창구, 신우식
-
[학술회의]
Electrochemical characteristic of electrodeposited CoWP films
(한국화학공학회 2010년 봄 학술대회)
- 2010.04
김창구, 이혜민, 손영선
-
[학술회의]
Angular dependence of SiO2 etch rates in C4F6/Ar/O2 and C4F6/Ar/O2/CH2F2 plasmas
(한국화학공학회 2010년 봄 학술대회)
- 2010.04
김창구, 조성운
-
[학술회의]
Electroless plating of NiMoP capping layers using alkali-free chemicals
(한국화학공학회 2010년도 봄 학술대회)
- 2010.04
김창구, 이혜민
-
[학술회의]
Preparation and characterization of chemically deposited Co-Ni composite oxide thin films for supercapacitor application
(한국화학공학회 2010년 봄 학술대회)
- 2010.04
김창구, S.G.Kandalkar, 서승혜
-
[학술회의]
Porous nanostructured Co3O4/NiO composite electrode for supercapacitors
(한국화학공학회 2010년 봄 학술대회)
- 2010.04
김창구, S.G.Kandalkar
-
[학술회의]
Angular dependence of Si3N4 etch rates and SiO2-to-Si3N4 etch selectivity in a C4F6/Ar/O2/CH2F2 plasma
(한국화학공학회 2009년도 가을 학술대회)
- 2009.10
김창구, 조성운, 이진관, 문상흡
-
[학술회의]
Shape and size control of platinum nanoparticles electrodeposited on graphite
(한국화학공학회 2009년도 가을 학술대회)
- 2009.10
김창구, 이혜민, 손영선
-
[학술회의]
Electrochemical analysis of CoWP thin films electrodeposited using alkali-free precursors
(한국화학공학회 2009년도 가을 학술대회)
- 2009.10
김창구, 지정민, 이혜민, 손영선, 신우식
-
[학술회의]
Characteristics of double cylindrical coils as an inductively coupled plasma source
(한국화학공학회 2009년 봄 학술대회)
- 2009.04
김창구, 김일욱, 엄평용, 신우식, 우상호
-
[학술회의]
Electrodeposition and characterisation of amorphous NiMoP thin films
(한국화학공학회 2009년 봄 학술대회)
- 2009.04
김창구, 윤형진, Dulal, 남궁윤미
-
[학술회의]
Electrodeposition of CoWP Thin Films Using Alkali-Free Chemicals
(한국화학공학회 2009년 봄 학술대회)
- 2009.04
김창구, 이혜민, Dulal, 손영선
-
[학술회의]
Electrochemical deposition of platinum nanoparticles on graphite with Polyvinylpyrrolidone
(한국화학공학회 2009년 봄 학술대회)
- 2009.04
김창구, 이혜민, Dulal, 손영선
-
[학술회의]
Characteristics of fluorocarbon films deposited in perfluorocarbon and unsaturated fluorocarbon plasmas
(한국화학공학회 2009년 봄 학술대회)
- 2009.04
김창구, 지정민, 조성운
-
[학술회의]
Characteristics of deep Si etching using the advanced Bosch process in PFC- and UFC- containing plasmas
(한국화학공학회 2009년 봄 학술대회)
- 2009.04
김창구, 지정민, 조성운
-
[학술회의]
Electrodeposition of platinum nanoparticles on carbon supports with polyvinylpyrrolidone
(한국공업화학회 2009년 춘계 학술대회)
- 2009.04
김창구, 이혜민, Dulal, 손영선
-
[학술회의]
Effect of process variables on the properties of electrodeposited alkali-free CoWP films
(한국공업화학회 2009년 춘계 학술대회)
- 2009.04
김창구, 이혜민, Dulal, 손영선
-
[학술회의]
Electrodeposition of nanostructured NiTi films
(한국화학공학회 2008년 가을 학술대회)
- 2008.10
김창구, 이혜민, 남궁윤미
-
[학술회의]
Development of an alkali-free bath for the electrodeposition of Co-W-P thin films
(한국화학공학회 2008년 가을 학술대회)
- 2008.10
김창구, 이혜민, 남궁윤미
-
[학술회의]
Effects of power and pressure on the optical and electrical properties of fluorocarbon films
(한국화학공학회 2008년 가을 학술대회)
- 2008.10
김창구, 지정민, 권혁규
-
[학술회의]
Characteristics of fluorocarbon thin films deposited in C4F8 and C4F6 plasmas
(한국화학공학회 2008년 가을 학술대회)
- 2008.10
김창구, 지정민, 권혁규
-
[학술회의]
Insulating Properties of Fluorocarbon Films Deposited in C4F8 Plasmas
(한국공업화학회 2008년 봄 학술대회)
- 2008.05
김창구, 박병훈, Mahapatra, 권혁규
-
[학술회의]
Optimization of Deep Si Etching Using SF6/C4F8 and SF6/C4F6 Plasmas
(한국공업화학회 2008년 봄 학술대회)
- 2008.05
김창구, 박병훈, 권혁규
-
[학술회의]
Electroless Plating of CoWP and NiMoP Films for Capping Layers in Cu Interconnection
(한국공업화학회 2008년 봄 학술대회)
- 2008.05
김창구, 이혜민, 남궁윤미
-
[학술회의]
Behavior of the Potential and Current Density During Electrodeposition of CoWP Thin Films
(한국공업화학회 2008년 봄 학술대회)
- 2008.05
김창구, 이혜민, 남궁윤미
-
[학술회의]
Comparison of Electrolessly Plated CoWP and NiMoP Capping Layers Using Alkali-Free Chemicals
(한국화학공학회 2008년 봄 학술대회)
- 2008.04
김창구, 이혜민
-
[학술회의]
Deep Si Etching using SF6/C4F8 and SF6/C4F6 Plasmas
(한국화학공학회 2008년 봄 학술대회)
- 2008.04
김창구, 박병훈, 우상호, 권혁규
-
[학술회의]
Dependence of magnetic properties of CoWP films on the electrolyte concentration
(한국화학공학회 2008년 봄 학술대회)
- 2008.04
김창구, Mahapatra, 남궁윤미
-
[학술회의]
Effect of Potential and Current Density on CoWP Electrodespotion
(한국화학공학회 2008년 봄 학술대회)
- 2008.04
김창구, 남궁윤미, 신치범
-
[학술회의]
Electrical and Optical Properties of Fluorocarbon Films Deposited in C4F8 Plasmas
(한국화학공학회 2008년 봄 학술대회)
- 2008.04
김창구, 박병훈, Mahapatra, 권혁규
-
[학술회의]
Size control of nano structured TiNi alloy by variation of the electrolyte concentration
(한국화학공학회)
- 2008.04
김창구, Mahapatra, 이혜민
-
[학술회의]
Investigation of Etch Characteristics of Deep Si Etching in PFC- and UFC-containing Plasmas
(한국화학공학회 2007년 가을 학술대회)
- 2007.10
김창구, 김일욱, 이형무, 권혁규, 우상호
-
[학술회의]
Structural and Morphongical Properties of Nitrogen Doped Polysilicon
(한국화학공학회 2007년 가을 학술대회)
- 2007.10
김창구, 우상호, 이형무, 최형수, 김해원, 엄평용, 이동근, 조성길, 권혁규, 김일욱
-
[학술회의]
Effects of pH and Temperature on Electroless Plating of CoWP Thin Films for Cu Interconnection
(한국화학공학회 2007년 가을 학술대회)
- 2007.10
김창구, S.M.S.I.Dulal, 김태호
-
[학술회의]
Electroless Plating of CoWP Thin Films Using Alkali-Free Chemicals
(한국화학공학회 2007년 가을 학술대회)
- 2007.10
김창구, S.M.S.I. Dulal, 김태호
-
[학술회의]
Development of electrolytes for electrodeposition of NiMoP thin films
(한국화학공학회 2007년 가을학술대회)
- 2007.10
김창구, S.M.S.I.Dulal, 이혜민, 남궁윤미, 윤형진
-
[학술회의]
Structural and Morphological Characterization of Electrodeposited CoWP Thin Films
(한국화학공학회 2007년 가을 학술대회)
- 2007.10
김창구, 윤형진, S.M.S.I.Dulal, 신치범
-
[학술회의]
Characterization of Corrosion Protective and Mechanical Properties of Electrodeposited CoWP Coatings
(한국화학공학회 2007년 가을 학술대회)
- 2007.10
김창구, 윤형진, S.M.S.I.Dulal, 신치범
-
[학술회의]
Effect of Process Variables on Electrodeposition of NiMoP Films
(한국화학공학회 2007년 가을 학술대회)
- 2007.10
김창구, S.M.S.I.Dulal, 윤형진, 신치범, 남궁윤미
-
[학술회의]
Experimental Determination of Thermal Conductivity of Multilayered Thin Films Using Photothermal Effect
(한국화학공학회 2007년 가을 학술대회)
- 2007.10
김창구, 유재석, 박창한, 김현정
-
[학술회의]
Development of Electroless Plating of Capping Layers by Using Alkali-Free Chemicals
(한국전기화학회 2007년 추계학술대회)
- 2007.10
김창구, S.M.S.I.Dulal, 이형무, 김태호, 박창한
-
[학술회의]
Effect of Electrolyte Concentration on Electrodeposition of NiMoP Amorphous Thin Films
(한국전기화학회 2007년 추계학술대회)
- 2007.10
김창구, S.M.S.I.Dulal, 윤형진, 이혜민, 권혁규, 남궁윤미
-
[학술회의]
Physical and Chemical Properties of CoWP Coatings Electrodeposited on Carbon Steel
(한국전기화학회 2007년 추계학술대회)
- 2007.10
김창구, 윤형진, S.M.S.I.Dulal, 신치범
-
[학술회의]
Electrodeposition of CoWP Diffusion Barrier Layer on Cu Substrate
(한국공업화학회 2007년 봄 학술대회)
- 2007.05
김창구, S.M.S.I.Dulal, 윤형진, 신치범
-
[학술회의]
Characteristics of Polymer Films Deposited in PFC- and UFC-containing Plasmas During the Bosch Process
(한국화학공학회 2007년 봄 학술대회)
- 2007.04
김창구, 이형무, 권혁규
-
[학술회의]
Electrodeposition of CoWP Thin Films on Copper Line on p-type Silicon Wafer
(한국화학공학회 2007년 봄 학술대회)
- 2007.04
김창구, S.M.S.I.Dulal, 윤형진, 신치범
-
[학술회의]
Separation of Nanoparticles in Nanochannels Using Electro-osmotic Force
(한국화학공학회 2007년 봄 학술대회)
- 2007.04
김창구, K.Nadiia, 강진영, 함승주, 오윤진, 정명기, 정찬화, 이형무, 백승준
-
[학술회의]
Comparison of Etch Characteristics in Deep Si Etching Using PFC- and UFC-containing Plasmas
(한국화학공학회 2007년 봄 학술대회)
- 2007.04
김창구, 이형무
-
[학술회의]
Electrochemical Deposition of Platinum Nanoparticles on Carbon Supports
(한국화학공학회 2007년 봄 학술대회)
- 2007.04
김창구, S.M.S.I.Dulal, 윤형진, 신치범
-
[학술회의]
Effect of Process Variables on the Properties of Electrodeposited CoWP Films
(한국화학공학회 2007년 봄 학술대회)
- 2007.04
김창구, S.M.S.I.Dulal, 윤형진, 신치범
-
[학술회의]
Electrodeposition of CoWB Films for Capping Layers in Cu Interconnections
(한국화학공학회 2007년 봄 학술대회)
- 2007.04
김창구, 남궁윤미
-
[학술회의]
The Measurement of Thermal Properties for Thin Films Using Photothermal Effect
(한국화학공학회 2007년 봄 학술대회)
- 2007.04
김창구, 유재석, 박창한, 김현정
-
[학술회의]
Electroless Plating of Capping Layers for Copper Interconnection Using Alkali Metal-Free Chemicals
(한국화학공학회 2007년 봄 학술대회)
- 2007.04
김창구, 윤형진, 김태호
-
[학술회의]
Electrodeposition of CoWP Diffusion Barrier Layer on Copper Interconnection Line
(한국전기화학회 2007년 춘계 학술발표회)
- 2007.04
김창구, S.M.S.I.Dulal, 윤형진, 신치범
-
[학술회의]
Electroless Plating of Co-Alloy Capping Layers for Copper Interconnection
(한국공업화학회 2006년 가을 학술대회)
- 2006.11
김창구, 윤형진, 김태호
-
[학술회의]
A Comparative Study on Deep Si Etching Using PFC- and UFC-Containing Plasmas
(한국공업화학회 2006년 가을 학술대회)
- 2006.11
김창구, 이형무, 박창한
-
[학술회의]
Electrolyte Development for Electroless Plating of Cladding Layers in Cu Interconnection
(한국화학공학회 2006년 가을 학술대회)
- 2006.10
김창구, 윤형진, 김태호
-
[학술회의]
Environment-Friendly Plasma Etching of High Aspect Ratio Deep Si
(한국화학공학회 2006년 가을 학술대회)
- 2006.10
김창구, 이형무, 박창한
-
[학술회의]
Effects of the ion mass and the ion incident angle on etch rates in atomic scale etching
(한국화학공학회 2006년 봄 학술대회)
- 2006.04
김창구, 이형무, 박창한, 윤형진, 신치범, 김태호
-
[학술회의]
Plasma Etching of Silicon Dioxide Contact Hole Using Low Global Warming Potential Gases
(한국에너지기후변화학회 2005년 추계학술대회)
- 2005.12
김창구, 김일욱, 류현규, 신치범
-
[학술회의]
Atomic Scale Etching of Poly-Si in Inductively Coupled Ar and He Plasmas
(한국화학공학회 2005년도 가을 학술대회)
- 2005.10
김창구, 윤형진, 민재호, 김태호, 신치범, 문상흡
-
[학술회의]
차량용 12-V 납축전지의 동적 거동 모델링
(한국화학공학회 봄학술대회)
- 2005.04
신치범, 정승면, 김성태, 김창구, 이대훈
-
[학술회의]
A Comparative Study on Atomic Layer Etching of Chlorinated-Silicon Surfaces in Argon and Helium Plasma
(2004년도 화학공학회/공업화학회 공동 학술대회)
- 2004.10
김창구, 정희석, 신치범
-
[학술회의]
Etching of a 170 nm-diameter SiO2 Contact Hole in C4F6/O2/Ar Plasmas
(2nd Symposium for Nano-Chemical Processing)
- 2004.06
김창구, 류현규, 김일욱, 신치범, 정희석
-
[학술회의]
차량용 42V 전기공급 시스템을 위한 ultracapacitor의 열적 특성을 위한 모델링
(한국화학공학회 2004년도 봄학술대회)
- 2004.04
신치범, 이백행, 김병우, 김성민, 김창구, 이대훈
-
[학술회의]
Silicon Surface Smoothing by Argon Cluster Impact
(한국화학공학회 2003년도 가을학술대회)
- 2003.10
김창구, 고은용, 정희석, 신치범
-
[학술회의]
Interaction of a Plasma with Surface Topography
(2002 Fall Meeting)
- 2002.10
김창구
-
[학술회의]
Energy and Angular Distributions of Ions Extracted from a Hole in Contact with a High Density Plasma
(제1회 나노화학공정 심포지움 및 제4회 CVD 심포지움)
- 2002.06
김창구
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